2016
DOI: 10.1021/acssensors.5b00302
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In Situ Localized Growth of Porous Tin Oxide Films on Low Power Microheater Platform for Low Temperature CO Detection

Abstract: This paper reports a facile method for creating a nanostructured metal oxide film on a low power microheater sensor platform and the direct realization of this structure as a gas sensor. By fast annealing the deposited liquid precursors with the microheater, a highly porous, nanocrystalline metal oxide film can be generated in situ and locally on the sensor platform. With only minimal processing, a high performance, miniaturized gas sensor is ready for use. A carbon monoxide sensor using the in situ synthesize… Show more

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Cited by 66 publications
(54 citation statements)
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“…Incomplete recovery of the sensor leads to an unreliable sensing output in practical applications. Heating the sensing material with a microfabricated heater can enhance the reversibility of the sensor and accelerate the response and recovery rates, while maintaining low power consumption a shows the sensor response to 0.5 ppm NO 2 at various heating temperatures, ranging from room temperature to 200 °C.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Incomplete recovery of the sensor leads to an unreliable sensing output in practical applications. Heating the sensing material with a microfabricated heater can enhance the reversibility of the sensor and accelerate the response and recovery rates, while maintaining low power consumption a shows the sensor response to 0.5 ppm NO 2 at various heating temperatures, ranging from room temperature to 200 °C.…”
Section: Resultsmentioning
confidence: 99%
“…Faster response and recovery can be achieved by heating the sensing material, which increases the desorption rate of the adsorbed species. In order to keep the sensor power consumption low, a microfabricated heater is typically used for the heating . But integration of single‐layer materials onto a microfabricated heater platform can be difficult and the surface area is limited to the heater footprint.…”
Section: Introductionmentioning
confidence: 99%
“…The LSN membrane thermally isolates the heated sensing area and minimizes the heat loss through conduction to the silicon substrate. Full fabrication details and heater characterization can be found elsewhere . By using this design, the microheater sensor requires only ≈4.4 mW to reach 200 °C.…”
Section: Resultsmentioning
confidence: 99%
“…It is well known, that the gas response of the sensor can often be significantly enhanced by chemical modification of the metal oxide’s surface 2729 . In particular, finely dispersed clusters of noble metals (such as Pt, Pd, Au) may serve as catalysts for the chemical reaction between the analyze gas molecules with semiconductor 3035 .…”
Section: Introductionmentioning
confidence: 99%