In-situ monitoring of plasma-assisted processing of material using optical emission spectroscopy – Role of ionic lines

Pandey, Shail; Panchal, V.A.

doi:10.1016/j.matpr.2023.03.392

Materials Today: Proceedings

2023

DOI: 10.1016/j.matpr.2023.03.392

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In-situ monitoring of plasma-assisted processing of material using optical emission spectroscopy – Role of ionic lines

Shail Pandey

V.A. Panchal

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In-situ monitoring of plasma-assisted processing of material using optical emission spectroscopy – Role of ionic lines

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References 24 publications

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