In situ optical spectroscopy during deposition of Ag:Si3N4 nanocomposite films by magnetron sputtering

Simonot, Lionel; Babonneau, David; Camelio, S.; Lantiat, D.; Guérin, Philippe; Lamongie, B.; Antad, Vivek

doi:10.1016/j.tsf.2009.08.005

Cited by 43 publications

(27 citation statements)

References 29 publications

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“…For this purpose, plenty of experimental and theoretical works were undertaken, leading to the development of models and methods permitting to link nanostructure and optical response. Such models and methods are also needed for the determination of the nanostructure from noninvasive optical measurements such as spectroscopic ellipsometry, 15,16 differential reflectance spectroscopy, 17,18 optical transmittance, 11 or scattering measurements. 19 The early calculations of Mie 1,20 permitted the determination of the optical response of metal spheres of various sizes in the framework of classical electrodynamics.…”

Section: Introductionmentioning

confidence: 99%

Advanced optical effective medium modeling for a single layer of polydisperse ellipsoidal nanoparticles embedded in a homogeneous dielectric medium: Surface plasmon resonances

et al. 2012

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We calculate, in the quasistatic coupled dipole approximation, the analytical expressions of the effective dielectric tensor of a single layer of polydisperse ellipsoidal nanoparticles with two of their principal axes in the layer's plane and embedded in a homogeneous dielectric medium. The organization (isotropic or anisotropic) and orientation (without or with a preferential in-plane orientation) of the nanoparticles is taken into account, together with their (possibly correlated) in-plane size, in-plane projected shape, and height distributions. In particular, we propose to describe the response of a layer of nanoparticles presenting a height distribution by using a vertically graded effective medium model. The expressions are tested in the case of finely characterized dielectric/silver/dielectric granular trilayers grown by means of vapor deposition in which the silver coalesced nanoparticles present correlated in-plane size and in-plane projected shape/height distributions and a moderate surface coverage of about 25%. A satisfactory quantitative agreement is obtained between the simulated and measured surface plasmon extinction bands of the metal nanoparticles. This agreement is permitted by the capability of the effective medium model of taking into account the ellipsoidal shape of the nanoparticles. The significant role of the size and shape distributions is also demonstrated.

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Section: Introductionmentioning

confidence: 99%

Advanced optical effective medium modeling for a single layer of polydisperse ellipsoidal nanoparticles embedded in a homogeneous dielectric medium: Surface plasmon resonances

et al. 2012

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“…[ 3,4 ] The control of the plasmon features such as spectral width, [ 5 ] position, [ 6 ] and shape [ 7 ] can be accomplished by different physical deposition routes [8][9][10][11][12] providing adequate growing conditions of metal nanoparticles (MNPs). Pioneer works in the 1990s showed the optical selectivity of elongated Ag deposits on SiO 2 with applications as optical fi lters for windows to control solar heat gain and glare, among others.…”

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Selective Dichroic Patterning by Nanosecond Laser Treatment of Ag Nanostripes

et al. 2010

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The strong absorption of light [ 1 ] and the local amplifi cation of the electromagnetic fi eld [ 2 ] at the plasmon resonance of noble metal nanostructures have been the focus of hundreds of studies due to their practical applications for the fabrication of optical devices such as fi lters, non-linear optical components, or Raman enhancers. [ 3,4 ] The control of the plasmon features such as spectral width, [ 5 ] position, [ 6 ] and shape [ 7 ] can be accomplished by different physical deposition routes [8][9][10][11][12] providing adequate growing conditions of metal nanoparticles (MNPs). Pioneer works in the 1990s showed the optical selectivity of elongated Ag deposits on SiO 2 with applications as optical fi lters for windows to control solar heat gain and glare, among others. [ 13 ] Recently, assemblies of parallel stripes of MNPs have been fabricated onto preformed surfaces presenting a 1D periodic roughness [ 14 , 15 ] or bundled SiO 2 nanocolumns. [ 16 , 17 ] A signifi cant macroscopic optical dichroism has been reported for these systems that can be useful for the development of polarized light emitters or materials with an enhanced IR luminescence because of the excitation of two distinct plasmon resonances in the directions parallel (longitudinal mode) and perpendicular (transverse mode) to the stripes. [ 18 ] Architecture control of the metal assemblies plays a determinant role in the functional properties of the material. For this purpose, the softlithographic techniques provide means to accurately tailor the nanostructure of the materials. [18][19][20][21] Laser scanning is a softlithographic technique widely used to modify the shape and structure of metal nanoparticles. [21][22][23][24] Surface modifi cation can be easily achieved by in situ [ 21 ] or ex situ [22][23][24] pulsed laser treatment in the case of random systems of MNPs. In contrast, nothing has been reported about the effect of a pulsed laser on the structure and optical dichroism of autoorganized metal nanostructures. In this paper we show that nanosecond (ns) laser irradiation can be effectively used to control the optical dichroism of Ag stripes supported on SiO 2 nanocolumns (NCs). This dichroism can be effectively tailored along the full visible range. Thus, we propose the utilization of the AgNPs/SiO 2 NCs structures for writing dichroic patterns at the microscale with potential applications for encryption and data storage purposes.AgNPs/SiO 2 NCs fi lms were grown by a two-step process.[ 17 ]First, SiO 2 thin fi lms were deposited by glancing angle vapor deposition (GLAD) with a tilted columnar nanostructure and ≈ 350 nm thickness (see Figure S1a in the Supporting Information and the Experimental Section). [ 25 , 26 ] These structures present an anisotropic surface topography known as "bundling", [ 17 ] consisting of the coalescence of the NCs along the x -direction ( Figure S1b). The silver nanoparticles were then grown by DC sputtering at room temperature. The "bundled" SiO 2 NCs act as a template for the fabrication of Ag...

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“…[32][33][34] The LSPR band increases in amplitude and redshifts in position up to the near IR range with deposition time, in accordance with the development of larger and fl atter Ag nanoparticles. [ 31 ] However, for the same Ag effective thickness, the resonance is less pronounced, more redshifted and broader when Ag is deposited on a CSM TiO 2 buffer layer than on a MSM one. From these results, it may be suggested that CSM TiO 2 gives rise to fl atter nanoparticles with a larger dispersion in size and shape than those grown on MSM TiO 2 .…”

Section: Synthesis and Characterization Ofmentioning

confidence: 99%

“…[ 31 ] From the very early stage of Ag deposition on both MSM and CSM TiO 2 buffer layers, Figure 4 a,b shows the presence of a broad maximum in the differential refl ectance spectra, corresponding to the LSPR of Ag nanoparticles. The formation of such Ag nanoparticles, whose average size increases in time, results from well-known nucleation and coalescence phenomena following the Volmer-Weber growth mechanism.…”

Section: Synthesis and Characterization Ofmentioning

confidence: 99%

“…From these results, it may be suggested that CSM TiO 2 gives rise to fl atter nanoparticles with a larger dispersion in size and shape than those grown on MSM TiO 2 . [ 31 ] Figure 4 c,d displays the differential refl ectance spectra measured before and after capping the Ag nanoparticles ( t Ag = 4 nm) by MSM and CSM TiO 2 layers, respectively. During the capping by MSM TiO 2 , the LSPR band increases in amplitude and redshifts in position, in agreement with the change in the refractive index of their surrounding medium.…”

Section: Synthesis and Characterization Ofmentioning

confidence: 99%

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Magnetron Sputtering Deposition of Ag/TiO₂ Nanocomposite Thin Films for Repeatable and Multicolor Photochromic Applications on Flexible Substrates

Diop

Simonot

Destouches

et al. 2015

Adv Materials Inter

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It is reported on a reactive magnetron sputtering‐based deposition method to synthesize, at room temperature, photochromic nanocomposite thin films consisting of Ag nanoparticles sandwiched between nanoporous TiO2 layers. The fabrication process is compatible with large‐scale production and functional flexible substrates. It is shown that when TiO2 is deposited in the metallic mode, the formation of Ag metal nanoparticles induces localized surface plasmon resonances in the visible range and therefore the as‐deposited samples are colored. In contrast, when TiO2 is deposited in the compound mode, the trilayer samples are colorless because silver oxidizes during TiO2 deposition. It is demonstrated that the colorless samples can be colored under ultraviolet (UV) laser exposure at 244 nm due to the reduction of oxidized silver and the formation of metallic Ag nanoparticles. Moreover, irradiation at 647 nm wavelength of colored samples (as‐prepared or after UV exposure) gives rise to changes in the particle morphology that strongly modifies the film absorbance and results in a color transition from blue to orange. The choice of the irradiation wavelength allows controlling the color saturation of the sample up to the complete discoloration by using a visible laser at 488 nm. All these photochromic mechanisms are repeatable during cyclic processes.

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In situ optical spectroscopy during deposition of Ag:Si3N4 nanocomposite films by magnetron sputtering

Cited by 43 publications

References 29 publications

Advanced optical effective medium modeling for a single layer of polydisperse ellipsoidal nanoparticles embedded in a homogeneous dielectric medium: Surface plasmon resonances

Advanced optical effective medium modeling for a single layer of polydisperse ellipsoidal nanoparticles embedded in a homogeneous dielectric medium: Surface plasmon resonances

Selective Dichroic Patterning by Nanosecond Laser Treatment of Ag Nanostripes

Magnetron Sputtering Deposition of Ag/TiO₂ Nanocomposite Thin Films for Repeatable and Multicolor Photochromic Applications on Flexible Substrates

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In situ optical spectroscopy during deposition of Ag:Si3N4 nanocomposite films by magnetron sputtering

Cited by 43 publications

References 29 publications

Advanced optical effective medium modeling for a single layer of polydisperse ellipsoidal nanoparticles embedded in a homogeneous dielectric medium: Surface plasmon resonances

Advanced optical effective medium modeling for a single layer of polydisperse ellipsoidal nanoparticles embedded in a homogeneous dielectric medium: Surface plasmon resonances

Selective Dichroic Patterning by Nanosecond Laser Treatment of Ag Nanostripes

Magnetron Sputtering Deposition of Ag/TiO2 Nanocomposite Thin Films for Repeatable and Multicolor Photochromic Applications on Flexible Substrates

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Magnetron Sputtering Deposition of Ag/TiO₂ Nanocomposite Thin Films for Repeatable and Multicolor Photochromic Applications on Flexible Substrates