2011
DOI: 10.1016/j.actamat.2011.05.057
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In situ studies on the cohesive properties of α- and β-Ta layers on polyimide substrates

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Cited by 40 publications
(13 citation statements)
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“…From this observation, it can be concluded from the onset strain of fragmentation that the fracture strength of a β-Ta layer is lower than a α-Ta layer with an equivalent film thickness. This observation is in accordance with findings in literature [22]. The reason behind this phenomenon is the difference in the respective crystallographic unit cells of α-and β-Ta; α-Ta, which is present in the ductile bcc unit cell deforms plastically prior to crack formation, while the tetragonal β-Ta is brittle and has therefore only a limited capacity for plastic deformation.…”
Section: Discussionsupporting
confidence: 93%
“…From this observation, it can be concluded from the onset strain of fragmentation that the fracture strength of a β-Ta layer is lower than a α-Ta layer with an equivalent film thickness. This observation is in accordance with findings in literature [22]. The reason behind this phenomenon is the difference in the respective crystallographic unit cells of α-and β-Ta; α-Ta, which is present in the ductile bcc unit cell deforms plastically prior to crack formation, while the tetragonal β-Ta is brittle and has therefore only a limited capacity for plastic deformation.…”
Section: Discussionsupporting
confidence: 93%
“…Kapton® material is known to deform plastically from 4–5% of macoscopic strain. Actually, the plastic deformation of the substrate should be localized between the film fragments induced by cracks 34 that may enhance the buckling phenomenon.
Figure 1 AFM images highlighting the multi-cracking and subsequent buckling of a CoFeB 20 nm-film obtained at different strain states.
…”
Section: Resultsmentioning
confidence: 99%
“…7 of ref. 34 for Ta- α films for which the stresses are in situ measured by x-ray diffraction. We believe that this difference between σ xx and σ yy is sufficiently important for reminiscence in the residual state after discharge.…”
Section: Resultsmentioning
confidence: 99%
“…Additionally, the most intense reflection, (002), shows significantly higher intensity than that of the corresponding standard powder diffraction pattern that indicates that the coating grows predominantly with a (002) orientation. The presence of the (002) texture is frequently observed on β-Ta coatings prepared by the other sputter deposition techniques [21,22]. The average grain size of the coating was estimated to be ~18 nm by applying the Scherrer formula for peak broadening of the low angle (002) reflection, after the correction of instrumental line broadening [23].…”
Section: In Vitro Bioactivity Evaluationmentioning
confidence: 99%
“…As is well known, the grain size dependence of hardness for polycrystalline metals can be described by the classical Hall-Petch relationship. The hardness value changes from 15 GPa for the β-Ta film with a grain size of 32.3 nm [25] to [16][17][18][19][20][21][22][23] GPa for the β-Ta films with grain sizes in range of 5−15 nm [26]. According to the Archard's theory [27], the wear resistance is proportional to the hardness of Figure 4a shows the representative load-displacement (P-h) curves of the β-Ta coating and uncoated Ti-6Al-4V measured using a nanoindentation tester equipped with a Berkovich indentor under a maximum load of 20 mN.…”
Section: Crystalline Structure and Microstructure Of Ta Coatingmentioning
confidence: 99%