2017
DOI: 10.1016/j.spmi.2017.02.050
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In situ study on the thermal stability and interfaces properties of Er 2 O 3 /Al 2 O 3 /Si multi stacked films by X-ray photoelectron spectroscopy

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Cited by 4 publications
(2 citation statements)
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“…Therefore, it can be concluded from the above studies that doping rare-earth elements and sintering at low oxygen partial pressure are effective in preparing ceramics with colossal permittivity, low dielectric loss, and high insulation resistance. Er 2 O 3 is a very attractive rare earth oxide, with high resistivity (10 12 –10 15 Ω cm), high dielectric constant (7–20), broad band gap ( E g = 4.0–6.0 eV), and strong chemical and thermal stability . In addition, on account of Er 3+ being a kind of amphoteric dopant, showing higher amphoteric behavior under low oxygen partial pressure, more kinds of defects can be produced in ceramics.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it can be concluded from the above studies that doping rare-earth elements and sintering at low oxygen partial pressure are effective in preparing ceramics with colossal permittivity, low dielectric loss, and high insulation resistance. Er 2 O 3 is a very attractive rare earth oxide, with high resistivity (10 12 –10 15 Ω cm), high dielectric constant (7–20), broad band gap ( E g = 4.0–6.0 eV), and strong chemical and thermal stability . In addition, on account of Er 3+ being a kind of amphoteric dopant, showing higher amphoteric behavior under low oxygen partial pressure, more kinds of defects can be produced in ceramics.…”
Section: Introductionmentioning
confidence: 99%
“…This value is the characteristic signal for the Er 4 d 5/2 orbit, which is extremely close to that of Er 2 O 3 . [41][42][43] Therefore, this suggests that Er 3+ ions have entered into the Y 2 O 2 S matrix. Fig.…”
Section: Resultsmentioning
confidence: 99%