In-situ test structures for ultra low leak detection

Millar, Suzanne; Desmulliez, Marc Phillipe Yves; Cargill, S.; McCracken, Stewart

doi:10.1109/estc.2010.5642875

Cited by 4 publications

(2 citation statements)

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“…The main disadvantage of a majority of the methods included in the industrial standards is their destructivity, which limits their use only to the statistical approach. Many authors propose alternative solutions for the methods used in the industry [6][7][8][9][10][11][12][13]. It is possible to divide those methods into two main groups.…”

Section: Introductionmentioning

confidence: 99%

“…The first group of methods uses different types of spectroscopy techniques: Fourier transform infrared spectroscopy [6][7][8], Raman spectroscopy [8], and near-infrared spectroscopy [9]. The second group of methods described in [10][11][12][13] uses different piezoelectric, resistive, or capacitive internal structures of the component which monitor the changes of the internal pressure or the humidity increase inside of the package. The thermoacoustic test method presented in this article may be considered as an another example of a non-destructive alternative for destructive industrial hermeticity tests, especially for destructive gross leak detection methods such as a fluorocarbon bubble test or dye penetrant liquid test.…”

Section: Introductionmentioning

confidence: 99%

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Modeling of Thermoacoustic Frequency Characteristics for the Air-Tightness Test Method

Kubicki

Maliński

2014

Int J Thermophys

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This paper is a description of theoretical models applied for the numerical interpretation of the experimental amplitude and phase frequency thermoacoustic characteristics observed for the transistor's packaging TO-39 with model holes of known radii in the packaging. They are essential from the point of view of determination of the sensitivity of the thermoacoustic method applied for the measurements of the air-tightness of packagings of electronic elements. In this paper, two models of the thermoacoustic signal are described, which are based on a transformation of the thermoacoustic effect to an electrical circuit: CRC and CRLC. Additionally, a method of extraction of the signal, coming from the hole in the packaging, from the total thermoacoustic signal, of the TO-39 packaging, is presented and discussed. The limitation of this method of detection of the air-tightness, caused by the thermoacoustic signal of the air-tight packaging, is also discussed.

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