In situ X-ray diffraction analysis of intrinsic and extrinsic piezoelectric response in (100)/(001)-oriented tetragonal multidomain Pb(Zr, Ti)O₃ films epitaxially grown on Si substrates

Abstract

(100)/(001)-oriented tetragonal Pb(Zr,Ti)O3 films with different thickness of 400 nm, 1000 nm, 1700 nm and 2000 nm were epitaxially grown on (100) c SrRuO3//(100)Pt//(100)ZrO2//Si(100) substrates by pulsed laser deposition. Their ferroelectric and piezoelectric properties were investigated by polarization-electric field and strain-electric field measurements with increasing maximum strength of an applied electric field in a triangular wave. The macroscopic piezoelectric response was quantitatively analyzed with respect to intrinsic and extrinsic contributions based on in-situ X-ray diffraction results under an electric field. The domain switching from (100)- to (001)-oriented domain and the out-of-plane lattice compression in (100)-oriented domain were clearly observed under an electric field, while the out-of-plane lattice deformation of (100)-oriented domain was negligibly small. Furthermore, effective piezoelectric response due to domain switching increased with increasing the film thickness, which is attributed to the decrease of the constraint with increasing film thickness imposed by the substrate.