In situ X-ray measurements of MOVPE growth of InxGa1−xN single quantum wells

X‐ray investigations of GaInN single quantum wells grown by atomic layer epitaxy and metalorganic vapor phase epitaxy

“…In our previous work, a combination of X-ray CTR scattering and X-ray reflectivity (XRR) was used for investigation on the Ga 0.91 In 0.09 N single quantum well (SQW) structures with several monolayers (1 ML = 1/2 c-lattice constant) GaInN at 830 °C successfully. Within the error bars, the analysis results of XRR and X-ray CTR scattering spectra at 830 °C and at RT on the same sample matched well [9].…”

Continuous in situ X-ray reflectivity investigation on epitaxial growth of InGaN by metalorganic vapor phase epitaxy

“…Based on Vegard's law and Hooke's law, as described in Ref. [9] in detail, and interplanar crystal spacing equation, the indium composition of the fully strained InGaN is 0.114, and the fully relaxed InGaN is 0.135. For the fully strained In 0.114 Ga 0.886 N epilayer, the indium content is in very good agreement with X-ray CTR scattering measurement results for the fully strained SQW structure with the same growth condition.…”

“…1(b). As a result, the former could be used at room temperature (RT) and at growth temperatures before and after growth [9], whereas the latter could only be used at growth temperatures during crystal growth. In this study, the continuous in situ XRR measurement and the growth of the In 0.11 Ga 0.89 N epilayer were simultaneously started and stopped.…”

“…2(b) shows the relationship between X-ray wavelength λ and incident angle θ i under a fixed Δd 2 , such as 1 ML, 1 nm, and 8.9 nm on the basis of Eq. (9). When Δd 2 is equal to 1 ML (2.6 Å), the incident angle θ i will be 171 for a Cu-Kα 1 beam.…”

“…A combination of these techniques was successfully used to study In 0.09 Ga 0.91 N single quantum well (SQW) structures comprising several monolayers (1 ML ¼ 1⧸2 c-lattice constant) at 830 1C [9]. The presence of liquid indium layers on the GaN (0001) surface was demonstrated using datafitting of XRR curves [10].…”