In situ XPS analysis of the electronic structure of silicon and titanium thin films exposed to low-pressure inductively-coupled RF plasma

Fraxedas, Jordi; Schütte, Max L.; Sauthier, Guillaume; Tallarida, Massimo; Ferrer, S.; Carlino, V.; Pellegrin, Eric

doi:10.1016/j.apsusc.2020.148684

Cited by 10 publications

(4 citation statements)

References 47 publications

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“…At the same time, the border where the initial induced anode exists, a high potential zone, is black in initial stages but ends up showing only the Cu metal signals for 8 and 10 V external applied voltages, possibly involving an oxidation that yields to the copper tetrahydroxide anion species, as described in literature. 41 Deconvolution, considering other reports, [40][41][42][43][44][45][46][47][48][49][50][51][52] as summarized in Fig. S2, (ESI †) confirms that the most relevant changes correspond to region Z4, with Cu(OH) 2 formation, while Cu 2 O or Cu (intermediate clean stripes) predominate in other zones, with different thicknesses.…”

Section: Results and Discussion Experimentalsupporting

confidence: 78%

See 1 more Smart Citation

Oscillatory patterns in redox gradient materials through wireless bipolar electrochemistry. The dynamic wave-like case of copper bipolar oxidation

Fuentes-Rodriguez¹,

Pujades²,

Fraxedas

et al. 2022

Mater. Chem. Front.

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Section: Results and Discussion Experimentalsupporting

confidence: 78%

“…Deconvolution, considering other reports, 40–52 as summarized in Fig. S2, (ESI†) confirms that the most relevant changes correspond to region Z4, with Cu(OH) 2 formation, while Cu 2 O or Cu (intermediate clean stripes) predominate in other zones, with different thicknesses.…”

Section: Results and Discussion Experimentalsupporting

confidence: 71%

Oscillatory patterns in redox gradient materials through wireless bipolar electrochemistry. The dynamic wave-like case of copper bipolar oxidation

Fuentes-Rodriguez¹,

Pujades²,

Fraxedas

et al. 2022

Mater. Chem. Front.

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“…An intense peak is also observed in the spectrum of N1s scaffolds surface-modified in a pure xenon atmosphere, which is centered at the binding energy of 400.8 eV. The presence of this peak is due to molecularly chemisorbed nitrogen forming stable chemical bonds with the PLLA polymer backbone after the process of plasma modification [39,40]. It should be noted that the formation mechanism of nitrogenous titanium oxide coatings with alternating chemical composition is described in more detail in reference [8].…”

Section: Chemical Composition Of the Plla Scaffoldsmentioning

confidence: 95%

Electrospun Poly-L-Lactic Acid Scaffolds Surface-Modified via Reactive Magnetron Sputtering Using Different Mixing Ratios of Nitrogen and Xenon

et al. 2023

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Controlled regeneration processes involving tissue growth using the surface and structure of scaffolds, are actively used in tissue engineering. Reactive magnetron sputtering is a versatile surface modification method of both metal and polymer substrates, as the properties of the formed coatings can be modified in a wide range by changing the process parameters. In magnetron sputtering, the working gas and its composition have an influence on the chemical composition and physical characteristics of the obtained coatings. However, there are no studies addressing the influence of the nitrogen/xenon gas mixture ratio in direct current magnetron sputtering on the deposition rate, physicochemical and in vitro properties of surface-modified biocompatible poly-L-lactic acid scaffolds. In this study, the application of mixtures of nitrogen and xenon in various ratios is demonstrated to modify the surface of non-woven poly-L-lactic acid scaffolds by direct current magnetron sputtering of a titanium target. It has been found that the magnetron sputtering parameters chosen do not negatively influence the morphology of the prepared scaffolds, but increase the hydrophilicity. Moreover, quantitative spectroscopic analysis results indicate that the formed coatings are primarily composed of titanium oxide and titanium oxynitride compounds and is dependent on the gas mixture ratio only to a certain extent. Atomic force microscopy investigations of the roughness of the fibers of the electrospun scaffolds and the thickness of the coatings formed on them show that the considerable variations observed in the intrinsic fiber reliefs are due to the formation of a fine layer on the fiber surfaces. The observed decrease in roughness after plasma modification is due to temperature and radiation effects of the plasma. In vitro experiments with human osteosarcoma cells show that the scaffolds investigated here have no cytotoxic effect on these cells. The cells adhere and proliferate well on each of the surface-modified electrospun scaffolds, with stimulation of cell differentiation in the osteogenic direction.

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“…It was observed that the surface of the metal mirror was etched after plasma irradiation. Fraxedas et al [15] adopted a low-pressure inductively coupled plasma to clean optical components in synchrotron radiation sources in situ, using oxygen and argon as gas sources and characterized surface component changes by in-situ X-ray Photoelectron Spectroscopy (XPS).…”

Section: Introductionmentioning

confidence: 99%

Elucidating the surface damage behavior of sol-gel silica anti-reflective films during low-pressure plasma cleaning

Li,

Liu,

Jiang

et al. 2023

Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers

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In situ XPS analysis of the electronic structure of silicon and titanium thin films exposed to low-pressure inductively-coupled RF plasma

Cited by 10 publications

References 47 publications

Oscillatory patterns in redox gradient materials through wireless bipolar electrochemistry. The dynamic wave-like case of copper bipolar oxidation

Oscillatory patterns in redox gradient materials through wireless bipolar electrochemistry. The dynamic wave-like case of copper bipolar oxidation

Electrospun Poly-L-Lactic Acid Scaffolds Surface-Modified via Reactive Magnetron Sputtering Using Different Mixing Ratios of Nitrogen and Xenon

Elucidating the surface damage behavior of sol-gel silica anti-reflective films during low-pressure plasma cleaning

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