In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals

Korotcenkov, Ghenadii; Brînzari, V.; Cho, B. K.

doi:10.1155/2016/3816094

Cited by 65 publications

(50 citation statements)

References 195 publications

(357 reference statements)

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“…To clearly observe the R - T curves, the time axis was shifted for the samples with 0.5–4-ppm exposure [4,22,23,24,25,26,27]. …”

Section: Resultsmentioning

confidence: 99%

“…The Δ R values had less variation at a given ozone concentration. These results indicate that when the ozone concentration increases, more ozone molecules are adsorbed onto the surface of the film [3,4]. According to the plot, the limit of detection is approximately 80 ppb [28].…”

Section: Resultsmentioning

confidence: 99%

“…Good gas sensors should possess several characteristics, including high sensitivity, fast response, low energy consumption, long-term operation capability, and low fabrication cost [1,2,3,4,5,6]. Metal oxide semiconductors (MOSs) are the most popular gas-sensing materials, because they have low fabrication costs, high sensitivities, and long-term operation capability.…”

Section: Introductionmentioning

confidence: 99%

“…Metal oxide semiconductors (MOSs) are the most popular gas-sensing materials, because they have low fabrication costs, high sensitivities, and long-term operation capability. Thin films of MOSs such as tin oxide and zinc oxide, 2D materials, and graphene are widely used in different gas sensors to detect diverse target materials [1,2,3,4,5,6,7]. Recently, low-melting liquid metal-based reaction environments have been used to synthesize oxide nanomaterials with low dimensionality (2D materials) [8,9].…”

Section: Introductionmentioning

confidence: 99%

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Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Jiang

Chang

et al. 2018

Sensors

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In this study, the sensing properties of an amorphous indium gallium zinc oxide (a-IGZO) thin film at ozone concentrations from 500 to 5 ppm were investigated. The a-IGZO thin film showed very good reproducibility and stability over three test cycles. The ozone concentration of 60–70 ppb also showed a good response. The resistance change (ΔR) and sensitivity (S) were linearly dependent on the ozone concentration. The response time (T90-res), recovery time (T90-rec), and time constant (τ) showed first-order exponential decay with increasing ozone concentration. The resistance–time curve shows that the maximum resistance change rate (dRg/dt) is proportional to the ozone concentration during the adsorption. The results also show that it is better to sense rapidly and stably at a low ozone concentration using a high light intensity. The ozone concentration can be derived from the resistance change, sensitivity, response time, time constant (τ), and first derivative function of resistance. However, the time of the first derivative function of resistance is shorter than other parameters. The results show that a-IGZO thin films and the first-order differentiation method are promising candidates for use as ozone sensors for practical applications.

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“…To clearly observe the R - T curves, the time axis was shifted for the samples with 0.5–4-ppm exposure [4,22,23,24,25,26,27]. …”

Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Jiang

Chang

et al. 2018

Sensors

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“…It is produced in the troposphere in a chain of chemical reactions involving nitrogen and hydrocarbon gases as well. However, during the last decades, the level of ozone has dramatically increased in the troposphere, due to the interaction between sunlight and a wide range of chemicals emitted by anthropogenic activities, like automobiles and industry [1]. This is a critical issue, since high concentrations of this powerful oxidizing gas are hazardous to the human respiratory system, causing inflammation and congestion of the respiratory apparatus [2,3].…”

Section: Introductionmentioning

confidence: 99%

WO3-Doped Indium Oxide Thick Films for Ozone Detection at Low Temperature

Ziegler

Marchisio

Palmero

et al. 2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Ozone, a strong oxidizing gas, has dramatically increased its concentration in the troposphere during the last decades. Since high O3 concentrations are hazardous to human health, the development of effective methods and economic devices to detect this gas is an urgent need. In this frame, In2O3 is well known as an n-type ozone sensitive and selective material, generally displaying its optimal sensing capability in the temperature range 200-350 °C. To enhance the sensing capability of In2O3 and to decrease its operative temperature, in this work, commercial In2O3 powders were doped with 2.5 wt. % WO3. Pure and doped-In2O3 materials were used to develop sensing devices by screen-printing technology. Resistance measurements were performed in the temperature range 25 °C-150 °C under 200-500 ppb O3. Best results were obtained at 75 °C with sensor's responses as high as 40 under 200 ppb of ozone.

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Tunable Infrared Plasmon Response of Lithographic Sn‐doped Indium Oxide Nanostructures

Kapetanovic

Bicket

Lazar

et al. 2020

Advanced Optical Materials

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Transparent conductive oxides (TCOs) have strong potential for plasmonic applications. Given their easily tunable properties and low energy response, significant challenges in the controlled fabrication and precise characterization of TCOs must be better understood before this potential can be realized. Here, the mid‐ to near‐infrared plasmonic response of Sn‐doped In2O3 (ITO) nanostructures is presented, fabricated top‐down using electron beam lithography and radio‐frequency sputtering. These equilateral ITO triangles of different side lengths are imaged at high spatial and energy resolution with monochromated electron energy loss spectroscopy (EELS) in a scanning transmission electron microscope. Applying the Richardson–Lucy (RL) deconvolution algorithm to experimental EELS spectra reveals localized surface plasmon (LSP) excitations between 150 and 550 meV and a 730 meV bulk plasmon. This very‐low‐energy response to an electron beam is compared with boundary element method simulations of nanostructures. These simulations use the dielectric functions of continuous thin films of the same materials, characterized by ellipsometry, 4‐point probe, and Hall effect tests. Additionally, upon rapid thermal annealing of ITO, blue‐shifts in LSP energy, and longer LSP lifetimes are examined as a consequence of an amorphous‐to‐polycrystalline transformation and an increase in the free carrier density.

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In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Cited by 65 publications

References 195 publications

Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

WO3-Doped Indium Oxide Thick Films for Ozone Detection at Low Temperature

Tunable Infrared Plasmon Response of Lithographic Sn‐doped Indium Oxide Nanostructures

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