2018
DOI: 10.1021/acsnano.8b05604
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In2O3 Nanowire Field-Effect Transistors with Sub-60 mV/dec Subthreshold Swing Stemming from Negative Capacitance and Their Logic Applications

Abstract: Heat dissipation is a key issue for scaling metal-oxide-semiconductor field-effect transistors (MOSFETs). The Boltzmann distribution of electrons imposes a physical limit on the subthreshold swing (SS), which impedes both the reduction of the switching energy and the further increase of the device density. The negative capacitance effect is proposed to rescue MOSFETs from this phenomenon called “Boltzmann tyranny”. Herein, we report In2O3 nanowire (NW) transistors with SS values in the sub-60 mV/dec region, wh… Show more

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Cited by 35 publications
(21 citation statements)
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“…43 As shown in Fig. 5b, the SS of the In 2 O 3 NR FET device was determined to be 80 mV per decade, which is close to the limit of 60 mV per decade of the conventional MOSFETs 44,45 and is the highest performance when compared to previously reported values for nanoribbon based In 2 O 3 FETs ( Table 1). The low SS value achieved for In 2 O 3 NR FETs is attributed to the systematically optimized fabrication process that allows the deposition of ultra-low surface roughness indium oxide thin lm with uniform composition and dimensions 46,47 as well as the on-chip integration of the gate electrode.…”
Section: Electrical Characteristics Of the In 2 O 3 Nr Fetssupporting
confidence: 76%
“…43 As shown in Fig. 5b, the SS of the In 2 O 3 NR FET device was determined to be 80 mV per decade, which is close to the limit of 60 mV per decade of the conventional MOSFETs 44,45 and is the highest performance when compared to previously reported values for nanoribbon based In 2 O 3 FETs ( Table 1). The low SS value achieved for In 2 O 3 NR FETs is attributed to the systematically optimized fabrication process that allows the deposition of ultra-low surface roughness indium oxide thin lm with uniform composition and dimensions 46,47 as well as the on-chip integration of the gate electrode.…”
Section: Electrical Characteristics Of the In 2 O 3 Nr Fetssupporting
confidence: 76%
“…EQE is calculated as EQE = Rhc/eλ where h is Planck's constant, e is the electron charge, λ is the illumination wavelength, and c is the speed of light. [ 29 ] The values of R and EQE under wavelengths varied between 915 and 1550 nm at a V DS of 5 V, are depicted in Figure S13c of the Supporting Information. The maximum R and its corresponding EQE were obtain 915 nm and were 2.9 A W −1 and 397%, respectively.…”
Section: Figurementioning
confidence: 99%
“…However, the BTBT field‐effect transistors (FETs) typically show low On‐currents; while there are large number of subthermionic tunnel FETs reported in the literature, the recent ones based on 2D dichalcogenides demonstrate particularly high performance . An alternative approach to achieve subthermionic transport, originally proposed by Salahuddin and Datta and later experimentally demonstrated by various research groups, deals with concept that can actually reduce the body factor to values less than 1. This involves stabilizing a negative capacitance regime by placing a ferroelectric and dielectric layer in series to comprise the MOS capacitor.…”
mentioning
confidence: 99%