A series of Ti/Ti-diamond-like carbon
(Ti-DLC) films was deposited
onto monocrystalline Si substrates by dual-magnetron sputtering. The
mechanical properties, chemical composition, and microstructure of
the films were investigated by Raman spectroscopy, X-ray photoelectron
spectroscopy (XPS), scanning electron microscopy (SEM), X-ray diffraction
(XRD), and nanoindentation. The biocompatibility of the Ti-DLC films
was evaluated via cell viability testing. The TiC phase was formed
at a Ti content of 4.43 atom %, and the surface roughness gradually
increased as the Ti content increased. Ti-DLC films with 17.13 atom
% Ti exhibited superior adhesion strength and surface hardness. The
optical densities (ODs) of the different Ti-DLC films were similar,
indicating that the films exhibit biocompatibility regardless of the
Ti content. Overall, doping DLC films with Ti provides a better film
for medical applications, as it improves the mechanical properties,
as evidenced by the elastic modulus, hardness, adhesion strength,
and surface roughness of the coating, and maintains ideal biocompatibility.