2017
DOI: 10.1016/j.tsf.2017.09.006
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Incidence energy effect and impact assessment during homoepitaxial growth of nickel on (001), (111) and (110) surfaces

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Cited by 26 publications
(6 citation statements)
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“…However, when temperature decreases and/or the flux increases, the growth is dominated by deposition process favoring presence of isolated adatoms. These results are good agreement of many theoretical and experimental investigations have been devoted to study the island nucleation and monolayer growth of thin films …”
Section: Resultssupporting
confidence: 91%
See 1 more Smart Citation
“…However, when temperature decreases and/or the flux increases, the growth is dominated by deposition process favoring presence of isolated adatoms. These results are good agreement of many theoretical and experimental investigations have been devoted to study the island nucleation and monolayer growth of thin films …”
Section: Resultssupporting
confidence: 91%
“…These results are good agreement of many theoretical and experimental investigations have been devoted to study the island nucleation and monolayer growth of thin films. [19,[54][55][56][57][58] For the rate of deposition 1 ML s À1 (Figure 8a), we have the density of the islands is higher than the density of adatom, while in Figure 8c always for 1 ML s À1 and 200 K, we have the reverse. For 0.1 ML s À1 and 300 K (Figure 8a and d) always the density of the islands is higher than the density of adatom.…”
Section: Island and Adatom Densitiesmentioning
confidence: 99%
“…In turn, the use of modern computer simulation techniques, in particular the molecular dynamics (MD) method, and interatomic interaction potentials having ever-growing accuracy in description of metal-semiconductor systems behavior, allows comprehensive studies of iron silicides formation. The molecular dynamics method has been successfully used to simulate the growth processes of various metal [36][37][38][39], semiconductor [40][41][42], and also metalsemiconductor films [43][44][45] where the influence of the substrate temperature, deposition angle, and surface orientation on the structural properties of the synthesized films were examined in detail. In particular, the MD simulation of the growth of a hydrogenated silicon film on Si (001) substrate were used for studying the influence of the incidence angle of the deposited atoms.…”
Section: Introductionmentioning
confidence: 99%
“…Daw and Basket 42,43 developed the so-called Embedded Atom Method (EAM) to describe atomic interactions. The EAM method has been widely used to describe atomics in metallic systems during simulation of thin film growth 44,45 and metallic glasses. 46–48 Through this approach, the energy for an atom i is given by the sum of both multi-body and pairwise contributions, as expressed by the following equationwhere i and j denote atoms.…”
Section: System Modelmentioning
confidence: 99%