The performance of protonic ceramic fuel cells (PCFCs) using thin film BaCe 0.6 Zr 0.2 Y 0.2 O 3-δ (BCZY622) electrolyte has been studied. The reference cell with the La 0.8 Sr 0.2 MnO 3-δ cathode and Ni anode showed poor performance and short-term degradation. The overpotential of the anode and ohmic loss were the major factors for degradation, and a solid solution of Ni in the BCZY electrolyte has been observed. The electrical conductivity and the proton concentration of BCZY and BCZY622 doped with 5wt% NiO were measured by an impedance analysis and thermogravimetric analysis. The electrical conductivity and the proton concentration of BCZY622 decreased by introducing NiO. To avoid short-term degradation, the cell construction, manufacturing process, and cathode materials were improved. As a result, a carefully designed PCFC with thin film BCZY622, Ba 0.5 Sr 0.5 Co 0.8 Fe 0.2 O 3-δ cathode and Ni/BCZY622 cermet anode showed good power density of 200-300mW/cm 2 in the wide temperature range of 873 -1073K, and had stable power generation.