Materials Science in Semiconductor Processing
 2023
DOI: 10.1016/j.mssp.2022.107230
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Incorporation of N in p-type Zn-N-doped SnO2 films by varying N2 content in sputtering gas mixture

Ho Kim Dan
1
,
Minh Khang Pham
2
,
Huu Phuc Dang
3
et al.
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