Summary: Cathodoluminescence imaging is a technique which may combine a high-resolution spectroscopic method with a high-spatial resolution electron imaging technique to characterize chemical identity as well as physical size, shape, and spatial distribution of the materials which have cathodoluminescence. Cathodoluminescence imaging has been used to characterize yttrium aluminates in aluminum nitride ceramics. By digitally combining cathodoluminescence and backscattering electron images, it is possible not only to distinguish between different yttrium aluminates, but also to determine the size, shape, and spatial distribution of these phases. This information provides a route to understanding the local residual oxygen concentration before sintering, the amount of sintering aid to be added, and possible sintering schedule. Furthermore, this information may be related to other properties of aluminum nitride such as residual oxygen concentration and thermal conductivity.