Increasing the Laser-Induced Damage Threshold of Optical Components by Atmospheric Pressure Plasma Surface Finishing

Abstract

In this contribution, a plasma-based approach for finishing optics surfaces is introduced. Experiments were performed on classically manufactured zinc crown glass and sapphire. It is shown that the use of direct dielectric barrier discharge plasma at atmospheric pressure allows the removal of surface-adherent carbonaceous contaminations that were induced by classical manufacturing. Moreover, the use of such plasma leads to a certain decrease in surface roughness. Both effects, surface cleaning and smoothing finally increase the laser-induced damage threshold of optical components.

Improved the laser-induced damage threshold of fused silica by atmospheric pressure plasma processing

“…Atmospheric pressure plasma processing (APPP) has great promise for improving LIDT because it involves low-cost, noncontact, and high-efficiency material removal based on its pure chemical etching mechanism [4]. The atmospheric pressure plasma processing can reduce the carbon content on the surface, remove the redeposition layer, and widen the subsurface crack of fused silica [5,6]. However, there is a deteriorated surface morphology on the surface of fused silica etched by atmospheric pressure plasma.…”