Indentation-derived elastic modulus of multilayer thin films: Effect of unloading-induced plasticity

Abstract

Abstract

Extraction of Electromechanical Coefficients from Capacitance–Voltage Measurements of Unannealed Solution‐Processed KNN Thin Films: Effects of Frequency and Electrostatic and Mechanical Deformation

“…Direct nanoindentation‐based measurement of Young's modulus of amorphous thin films is known to be strongly dependent on the composition of the thin film and layer thickness [ 32 ] and material plasticity. [ 33 ] We are currently in the process of carrying out such measurements for KNN to improve the parameters used in the COMSOL model.…”

Delamination analysis of metal–ceramic multilayer coatings subject to nanoindentation

“…The same set of material parameters were used previously to numerically study basic nanoindentation response [16], cyclic indentation behavior [27], the effect of layer undulation [28] and the effect of unloading induced plasticity [29] in the Al/SiC multilayer coatings. In the present work the effect of delamination is investigated.…”

Young's modulus of thin SmS films measured by nanoindentation and laser acoustic wave

“…Although the indentation response of a thin film on a substrate is a complex function of the elastic and plastic properties of both the film and substrate, nanoindentation is a promising method for obtaining mechanical property information of thin films for input to theoretical and computational analysis [5][6][7][8][9][10][11][12][13][14]. In order to measure "film-only" properties, a commonly used approach is to limit the indentation depth to less than 10 % of the film thickness, although depending on the properties of the film and substrate, the depth limit varies, with values reported between 5 % and 35 % of the film thickness [11,15].…”