2016
DOI: 10.1007/s11249-016-0805-5
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Indentation Hardness Measurements at Macro-, Micro-, and Nanoscale: A Critical Overview

Abstract: The Brinell, Vickers, Meyer, Rockwell, Shore, IHRD, Knoop, Buchholz, and nanoindentation methods used to measure the indentation hardness of materials at different scales are compared, and main issues and misconceptions in the understanding of these methods are comprehensively reviewed and discussed. Basic equations and parameters employed to calculate hardness are clearly explained, and the different international standards for each method are summarized. The limits for each scale are explored, and the differ… Show more

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Cited by 417 publications
(224 citation statements)
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“…MgO is selected as substrate material because it is isostructural with VN and exhibits a sufficient film/substrate lattice mismatch (0.9%) to enable film relaxation, a necessity for the investigation of intrinsic properties. VNx(001) hardness and Young's moduli values as a function of x are quantified [21,22] via nanoindentation experiments performed on 300-nm-thick films in a Hysitron TI950 Triboindenter using a sharp Berkovich 142.3° diamond probe (tip radius ~150 nm) calibrated to an epitaxial TiN/MgO(001) sample. Nine indentations, arranged in a 3 × 3 pattern with indents separated by 10 µm, are made in each sample with a maximum tip penetration limited to 10% of the film thickness, which was verified to avoid spurious substrate effects on measured hardness values.…”
Section: Methodsmentioning
confidence: 99%
“…MgO is selected as substrate material because it is isostructural with VN and exhibits a sufficient film/substrate lattice mismatch (0.9%) to enable film relaxation, a necessity for the investigation of intrinsic properties. VNx(001) hardness and Young's moduli values as a function of x are quantified [21,22] via nanoindentation experiments performed on 300-nm-thick films in a Hysitron TI950 Triboindenter using a sharp Berkovich 142.3° diamond probe (tip radius ~150 nm) calibrated to an epitaxial TiN/MgO(001) sample. Nine indentations, arranged in a 3 × 3 pattern with indents separated by 10 µm, are made in each sample with a maximum tip penetration limited to 10% of the film thickness, which was verified to avoid spurious substrate effects on measured hardness values.…”
Section: Methodsmentioning
confidence: 99%
“…The "rule of thumb" for nanoindentations, stating that the indenter should not penetrate more than 10% of the total film thickness, has been shown to fail in many materials (see [36] and references therein). In some of our W-B-C films, the maximum penetration depth hmax was calculated using the graphical method explained in the standard ISO 14577 Part 4 [37].…”
Section: Methodsmentioning
confidence: 99%
“…To compare reported values on elastic modulus (E) from the literature with our measured Er values, we applied the formula; 1/Er=((1-n 2 )/E)+((1-ni 2 )/Ei)) from ref. [36] and assumed: a Poisson's ratio for the sample n=0.25, a Poisson's ratio for the indenter of n=0.07, and the elastic modulus of the indenter to be Ei=1140 GPa. Figure 1a shows the elemental composition obtained from the quantitative analysis of XPS spectra for W-B-C films deposited with TMB flows of 1, 2.5, 5, 7.5, and 10 sccm at 500 o C. As observed, all films are metal-rich and where the W content decreases from ~ 93 at% to ~ 73 at% from with increasing TMB content in the plasma.…”
Section: Methodsmentioning
confidence: 99%
“…The fracture toughness K Ic of fused silica was set to be 0.75 MPa·m 1/2 which was measured using the double‐cantilever cleavage technique . In addition, the Poisson's ratio ν i and the Young's modulus E i of the diamond indenter were 0.07 and 1140 GPa, respectively …”
Section: Materials Properties and Indentation Experimentsmentioning
confidence: 99%