A micro- or nanosized electrically
controlled source of optical
radiation is one of the key elements in optoelectronic systems. The
phenomenon of light emission via inelastic tunneling (LEIT) of electrons
through potential barriers or junctions opens up new possibilities
for development of such sources. In this work, we present a simple
approach for fabrication of nanoscale electrically driven light sources
based on LEIT. We employ STM lithography to locally modify the surface
of a Si/Au film stack via heating, which is enabled by a high-density
tunnel current. Using the proposed technique, hybrid Si/Au nanoantennas
with a minimum diameter of 60 nm were formed. Studying both electronic
and optical properties of the obtained nanoantennas, we confirm that
the resulting structures can efficiently emit photons in the visible
range because of inelastic scattering of electrons. The proposed approach
allows for fabrication of nanosized hybrid nanoantennas and studying
their properties using STM.