Indium Tin Oxide Nanosized Transparent Conductive Thin Films Obtained by Sputtering from Large Size Planar and Rotary Targets

Medvedovski, Eugene; Szepesi, Christopher J.; Yankov, Olga; Lippens, Paul

doi:10.1002/9780470931011.ch12

Cited by 3 publications

(3 citation statements)

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“…In the nitrogen‐processed films, XRD peaks corresponding to both In 2 O 3 and InN were identified, and no preferred orientation was observed in these films. We believe that the isolated crystallites observed on the surface were formed by a vaporization–condensation mechanism, whereby the growth of InON was triggered by the instability of sub‐oxides of indium at low temperatures and oxygen‐partial pressures . This led to the formation of a densified, nonporous layer that can be seen in the SEM fractographs in Fig.…”

Section: Resultssupporting

confidence: 73%

“…We believe that the isolated crystallites observed on the surface were formed by a vaporization-condensation mechanism, whereby the growth of InON was triggered by the instability of sub-oxides of indium at low temperatures and oxygen-partial pressures. 13 This led to the formation of a densified, nonporous layer that can be seen in the SEM fractographs in Fig. 1(b).…”

Section: Resultsmentioning

confidence: 95%

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Stability and Microstructure of Indium Tin Oxynitride Thin Films

et al. 2011

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Indium oxide (In2O3) and indium tin oxide (ITO) thin films have been investigated for high temperature thermocouple and strain guage applications. Reactive sputtering in nitrogen‐rich plasmas was used to improve the high temperature stability of indium oxide‐based films in air and scanning electron microscopy was used to follow the microstructural changes in the nitrogen‐processed films. When thermally cycled at temperatures above 800°C, a partially sintered microstructure comprised of nanometer‐sized crystallites was revealed. A densified layer was also formed on the surface, which acted as an oxygen‐diffusion barrier in the bulk film. This combined with a network of partially sintered oxynitride crystallites lead to considerable open porosity and a stabilizing effect on the ensuing electrical properties. In this article, the thermoelectric properties of nitrogen‐processed films were evaluated at temperatures up to 1400°C. To study the effect of nitrogen plasma processing on the sintering kinetics and associated densification, the constrained sintering of the resulting films was followed as a function of time and temperature. Based on the measured thermoelectric properties of the nitrogen processed films, drift rates on the same order of magnitude as commercial type K wire thermocouples were realized for these all‐ceramic thermocouples.

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Section: Resultssupporting

confidence: 73%

Section: Resultsmentioning

confidence: 95%

Stability and Microstructure of Indium Tin Oxynitride Thin Films

et al. 2011

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“…The Seebeck coefficient of ITO is given by Equation (4) , the same expression used for metals, which is valid because of the free electron-like behavior in degenerate semiconductors. Incorporation of nitrogen into ITO has been shown to reduce the carrier concentration as well as the Fermi level due to an increase in activation energy which increases the Seebeck coefficient of ITO [ 22 ]. Figures 11 and 12 show the thermoelectric output of an In 2 O 3 :ITO thin film thermocouple over many cycles and a 100 h heat soak test, respectively.…”

Section: Resultsmentioning

confidence: 99%

Metallic and Ceramic Thin Film Thermocouples for Gas Turbine Engines

Tougas

Amani

Gregory

2013

Sensors

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Temperatures of hot section components in today's gas turbine engines reach as high as 1,500 °C, making in situ monitoring of the severe temperature gradients within the engine rather difficult. Therefore, there is a need to develop instrumentation (i.e., thermocouples and strain gauges) for these turbine engines that can survive these harsh environments. Refractory metal and ceramic thin film thermocouples are well suited for this task since they have excellent chemical and electrical stability at high temperatures in oxidizing atmospheres, they are compatible with thermal barrier coatings commonly employed in today's engines, they have greater sensitivity than conventional wire thermocouples, and they are non-invasive to combustion aerodynamics in the engine. Thin film thermocouples based on platinum:palladium and indium oxynitride:indium tin oxynitride as well as their oxide counterparts have been developed for this purpose and have proven to be more stable than conventional type-S and type-K thin film thermocouples. The metallic and ceramic thin film thermocouples described within this paper exhibited remarkable stability and drift rates similar to bulk (wire) thermocouples.

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Metallic and Ceramic Thin Film Thermocouples

Tougas¹

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Indium Tin Oxide Nanosized Transparent Conductive Thin Films Obtained by Sputtering from Large Size Planar and Rotary Targets

Cited by 3 publications

References 24 publications

Stability and Microstructure of Indium Tin Oxynitride Thin Films

Stability and Microstructure of Indium Tin Oxynitride Thin Films

Metallic and Ceramic Thin Film Thermocouples for Gas Turbine Engines

Metallic and Ceramic Thin Film Thermocouples

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