2024
DOI: 10.1002/eng2.12836
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Indium tin oxide thin film preparation and property relationship for humidity sensing: A review

Vinooth Rajendran,
Anil Prathuru,
Carlos Fernandez
et al.

Abstract: This review aims to present a critical overview of indium tin oxide (ITO) thin film preparation methods, structure–property relationship, and its humidity sensing. A range of passive and active humidity sensors with thin films (based on metal oxides) detects humidity. ITO thin film has advantageous properties, such as low resistivity and high stability, making it highly suitable for humidity sensing applications. ITO thin film has shown the efficient level of humidity sensing, and a compatible size of humidity… Show more

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