Inductively coupled plasma mass spectrometric determination of ultra-trace elements in electronic-grade water and chemicals using dulcitol

Takeda, Kikuo; Ikushima, Shiro; Okuzaki, Junichi; Watanabe, Satoru; Fujimoto, Taketoshi; Nakahara, Tsutomu

doi:10.1016/s0003-2670(00)01169-7

Cited by 16 publications

(6 citation statements)

References 12 publications

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“…This is why a several-fold enrichment method for phosphorus determination in the ultrapurified water samples, which is also used as a carrier, without the addition of any reagents was adopted in this study, as well as in a previous analysis of ultrapurified water. 2,3,22,23 During the evaporation of samples, some elements in the samples may be lost because of vaporization of the elements to the air, such as Ti, Ge and Sb. 23,24 To make sure that phosphorus would not be lost during the evaporation/preconcentration step, the recovery test of phosphorus in the evaporation step was examined and the obtained results are given in Table 4.…”

Section: Determination Of Phosphorus In Ultrapurified and Purified Wamentioning

confidence: 99%

Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Oshima

Sabarudin

et al. 2005

ANAL. SCI.

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IntroductionNowadays, especially in semiconductor industries, large amounts of ultrapurified chemicals, such as water, hydrogen peroxide, acids, and bases, are required for manufacturing highquality semiconductors in microelectronic industries. 1 The use of ultrapurified chemicals can help to fulfill two main objectives, namely the production of high-quality products and the minimization of rejects.2 Consequently, there has been a growing demand for the sensitive and accurate determination of trace and ultratrace amounts of impurities, such as boron, phosphorus and silicon, in ultrapurified chemicals. In general, such nonmetallic elements/compounds are less sensitive to conventional atomic spectroscopic methods, such as AAS, ICP-AES and ICP-MS. For example, the limits of detection (LOD) of silicate and phosphate in ICP-MS, which is known to be one of the most sensitive instruments and is often used in semiconductor analysis, are about 1 ppb or larger. Therefore, its sensitivity is not sufficient for the determination of a sub-ppb or ppt level of such non-metallic substances.The determination of trace and ultratrace amounts of phosphorus has become more and more important in such fields as semiconductor industry, ultrapurified chemicals (UPC) and ultrapurified water (UPW) manufactures etc. 3 The phosphomolybdenum blue method, either with or without solidphase enrichment, has often been used for phosphorus and silicate determination, 4-8 though the procedures are sometimes troublesome and time-consuming, for improving the sensitivity they need filtration/collection procedures with membrane filters. Sensitive spectrophotometric and fluorometric methods based on ion-associate formation deserve much attention. Molybdophosphate forms ion-association complexes with bulky cationic or basic dyes, which are the basis of sensitive detection methods for determining phosphorus spectrophotometrically. Malachite Green has found the widest application.9-15 Motomizu et al. [16][17][18] have reported a highly sensitive spectrophotometric method for determining phosphorus at sub-ppb and ppt levels using relatively small volumes of the sample solutions, an organic solvent (methyl cellosolve: MC), and a tiny membrane filter for collecting the ion associate of molybdophosphate with Malachite Green. The absorbance of the collected ion associate dissolved in MC was measured by an off-line flow injection-spectrophotometric detection method, which is relatively simple and shows excellent sensitivity. However, the collection/concentration procedure with a tiny membrane filter and dissolution of the ion associate in MC is troublesome and time-consuming.Highly sensitive fluorescence quenching methods for the determination of phosphate coupled with a flow-injection technique were also reported. These methods are based on the formation of an ion associate of molybdophosphate with Rhodamine 6G. 19,20 They are very sensitive with a detection limit of 0.1 ppb, 19 though the prepared reagent solution was not stable. Later, a method with Rhodamine...

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Section: Determination Of Phosphorus In Ultrapurified and Purified Wamentioning

confidence: 99%

Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Oshima

Sabarudin

et al. 2005

ANAL. SCI.

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“…Consequently, an enrichment method which uses some chemicals, reagent and solvents can not be adopted. This is why a several-fold enrichment method for silicate in ultrapurified water samples without the addition of any reagents was adopted in this study, and probably in all previous analysis of ultrapurified water [7][8][9][10][11].…”

Section: Sample Enrichment Methodsmentioning

confidence: 99%

“…Takeda et al [8,9] also applied ICP-MS for the determination of ultra-trace elements in electronic-grade water, in which samples had to be concentrated by a non-boiling evaporation technique (500 cm 3 to 5 cm 3 ), and polyhydric alcohol (dulticol) was added to the samples to prevent vaporization loss of analytes such as Ti, Ge and Sb. Yoshimura and Hase [10] reported a flow analysis for the determination of silicate in highly purified water : the method was based on the adsorption of an ion associate on the Sephadex LH-20 gel.…”

Section: Introductionmentioning

confidence: 99%

Novel flow injection-fluorometric method for the determination of trace silicate and its application to ultrapurified water analysis

Sabarudin¹

2003

Talanta

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A highly sensitive fluorescence quenching method for the determination of silicate based on the formation of an ion associate between molybdosilicate and Rhodamine B (RB) in nitric acid medium was developed. A flow injection system coupled with a fluorescence detector was used for the measurement of fluorescence intensity at 560 nm and 580 nm as excitation and emission wavelengths, respectively. The calibration graph for Si showed a linear range of 0.1 -5 ng cm -3 with correlation coefficient of 0.9989, and the detection limit of 0.06 ng cm -3 . The proposed method was successfully applied to the determination of silicate in ultrapurified water with satisfactory results.

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“…However, these methods are laborious and are apt to carry a risk of contamination. A variety of methods have been proposed for the determination of thallium such as inductively coupled plasma (Miyazaki et al, 1992), inductively coupled plasma-mass spectroscopy (Takeda et al, 2001;Wolf et al, 2005), atomic absorption spectroscopy (Carpenter, 1981;Silva et al, 2004), X-ray fluorescence (Mihajlovic and Stafilov, 1998), electroanalytical methods (Ciszewski et al, 1997;Shams and Yekehtaz, 2002; ABSTRACT: Methylene blue has been proposed as a new analytical reagent for the catalytic spectrophotometric determination of thallium (I). It reacts with ascorbic acid in acidic medium to form a colorless product.…”

Section: Introductionmentioning

confidence: 99%

Thallium determination using catalytic redox reaction between methylene blue and ascorbic acid

Tabatabaee

Shishehbore

Bagheri

et al. 2010

Int. J. Environ. Sci. Technol.

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Inductively coupled plasma mass spectrometric determination of ultra-trace elements in electronic-grade water and chemicals using dulcitol

Cited by 16 publications

References 12 publications

Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Trace and Ultratrace Analysis of Purified Water Samples and Hydrogen Peroxide Solutions for Phosphorus by Flow-Injection Method

Novel flow injection-fluorometric method for the determination of trace silicate and its application to ultrapurified water analysis

Thallium determination using catalytic redox reaction between methylene blue and ascorbic acid

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