2003
DOI: 10.1016/s0257-8972(02)00685-0
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Industrial applications of PACVD hard coatings

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Cited by 94 publications
(43 citation statements)
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“…), extensive research has been conducted in order to investigate the mechanical response of these coated systems. Within this context, existing literature concentrates on the influence of either chemical nature or layer-architecture of the film on hardness, scratch resistance, friction coefficient, as well as wear and impact behavior [3,[8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…), extensive research has been conducted in order to investigate the mechanical response of these coated systems. Within this context, existing literature concentrates on the influence of either chemical nature or layer-architecture of the film on hardness, scratch resistance, friction coefficient, as well as wear and impact behavior [3,[8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…Electrical resistivity values decrease with the increase in the hardness values, reaching a maximum value of 5.77 × 10 6 Ω-cm for the SC coating; therefore the flow of nitrogen is an important variable to consider in deposition processes, depending on the application required. Growing conditions for the SC coating would favor its application in the diffusion barriers in integrated circuits 5 , while the SA coating conditions have greater application in the metalworking industry, where high-speed steel parts are used for cutting [9][10][11] . Fig.…”
Section: Resultsmentioning
confidence: 99%
“…It is well-established that successful functionality of a hard coating system depends not only on composition, microstructure and architecture of the layer itself [49][50][51][52][53], but also on the surface integrity of the supporting substrate as well as on the interface nature and strength. Within this context, existing literature concentrates on the influence of the former aspect.…”
Section: Surface Integrity Issues On Coated Cemented Carbidesmentioning
confidence: 99%