Industrial PERC Cells with Efficiencies up to 18.5% Using a Spatial ALD Aluminium Oxide Passivation Layer

Vermang, Bart; Ernst, Marius; Кузнецов, В. И.; Vermont, P.; Vanormelingen, K.

doi:10.4229/27theupvsec2012-2bv.6.4

27th European Photovoltaic Solar Energy Conference and Exhibition; 1486-1488 2012

DOI: 10.4229/27theupvsec2012-2bv.6.4

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Industrial PERC Cells with Efficiencies up to 18.5% Using a Spatial ALD Aluminium Oxide Passivation Layer

Bart Vermang

Marius Ernst²,

В. И. Кузнецов³

et al.

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Industrial PERC Cells with Efficiencies up to 18.5% Using a Spatial ALD Aluminium Oxide Passivation Layer

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