Influence mechanism of magnetron sputtering process parameters on diamond surface preprocessing interface for chip heat sink

Lu, Yi; Chen, Wei; Wang, Changrui; Tian, Wei; He, Jiawen; Liao, Wenhe

doi:10.1016/j.diamond.2024.111695

Diamond and Related Materials

2024

DOI: 10.1016/j.diamond.2024.111695

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Influence mechanism of magnetron sputtering process parameters on diamond surface preprocessing interface for chip heat sink

Yi Lu,

Wei Chen,

Changrui Wang

et al.

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Influence mechanism of magnetron sputtering process parameters on diamond surface preprocessing interface for chip heat sink

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References 19 publications

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