2020
DOI: 10.1016/j.diamond.2020.107965
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Influence of agglomerated diamond abrasive wear on sapphire material removal behavior

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Cited by 35 publications
(10 citation statements)
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“…Prior to nano-indentation and nano-scratching, all wafers should be lapped and polished to be ultra-smooth on both surfaces and damage-free. For high efficiency, a fixed abrasive pad [ 17 , 18 , 19 , 20 , 21 ] was adopted in lapping processing. Thereby, 50 wt.% of W14 diamond grits (grain size of 10–14 μm) were fixed into this lapping pad, and the slurry was the deionized water only mixed with 0.2% OP-10.…”
Section: Methodsmentioning
confidence: 99%
“…Prior to nano-indentation and nano-scratching, all wafers should be lapped and polished to be ultra-smooth on both surfaces and damage-free. For high efficiency, a fixed abrasive pad [ 17 , 18 , 19 , 20 , 21 ] was adopted in lapping processing. Thereby, 50 wt.% of W14 diamond grits (grain size of 10–14 μm) were fixed into this lapping pad, and the slurry was the deionized water only mixed with 0.2% OP-10.…”
Section: Methodsmentioning
confidence: 99%
“…That may be because the soft polymers under load tend to ease wear through their deformation. 48 The schematic diagram of the worn section is shown in Figure 15a. The parameters of the worn section, width w and depth h, are extracted.…”
Section: Pa@epmentioning
confidence: 99%
“…Due to the difficulty of machining, much attention is paid to the technological issues of processing the friction surfaces of sapphire. In [1], sapphire was tested for friction with a pin-on-disk test. The disc was coated with agglomerated diamond grit.…”
Section: Tribological Properties Of Sapphire Under Dry Friction Against Chromium and Zirconium Ceramicsmentioning
confidence: 99%