The ReaxFF molecular dynamics (MD) simulations were conducted to investigate the oxidation of aluminum nanoparticles (ANPs) with varying particle sizes (3, 4, 5, 6, and 7 nm) and at different temperatures (300, 400, 500, 600, and 700 K). The primary objectives were to elucidate the oxidation mechanism of ANPs, analyze the oxide composition, and assess the influence of particle size and temperature on the oxidation layer of ANPs. The results show that the surface of ANPs will generate void spaces due to hot spots and high-temperature areas, and the oxidation reaction of ANPs between 0 and 10 ps can be divided into three stages, which are affected by temperature, ion migration rate, and void spaces. The internal oxide layer of ANPs is mainly composed of Al 4 O, and the external oxide layer is mainly composed of AlO 3 and AlO 4 . High temperatures promote the oxidation rate by increasing the atomic activity of the reaction and changing the surface structure of the oxide layer. The essence of the change in ANPs oxidation behavior caused by the particle size is to affect the degree of deformation at the initial stage of oxidation.