Influence of AlN interlayer on AlGaN/GaN heterostructures grown by metal organic chemical vapour deposition

AlN interlayer-induced reduction of dislocation density in the AlGaN epilayer

“…10,[18][19][20] Research about this topic is gaining momentum again. [21][22][23][24] In recent studies, attention has been directed towards the local structure and ordering of Al atoms in thick AlGaN epilayers. 25 However, to our surprise, the majority of this recent literature overlooks the defect state, specifically dislocation densities, in the AlGaN layer, 21,22 which might give interesting answers about both the electrical and optical properties of the whole heterostructure.…”

“…21–24 In recent studies, attention has been directed towards the local structure and ordering of Al atoms in thick AlGaN epilayers. 25 However, to our surprise, the majority of this recent literature overlooks the defect state, specifically dislocation densities, in the AlGaN layer, 21,22 which might give interesting answers about both the electrical and optical properties of the whole heterostructure. 8 Thus, understanding the defect state within the AlGaN epilayer will aim to contribute to the current body of knowledge.…”