2011
DOI: 10.1016/j.matlet.2011.06.021
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Influence of annealing temperature on the structural, topographical and optical properties of sol–gel derived ZnO thin films

Abstract: a b s t r a c t Keywords:Zinc oxide thin film Sol-gel preparation Annealing X-ray diffraction Atomic force microscopy Optical properties This investigation deals with the effect of annealing temperature on the structural, topographical and optical properties of Zinc Oxide thin films prepared by sol-gel method. The structural properties were studied using X-ray diffraction and the recorded patterns indicated that all the films had a preferred orientation along (002) plane and the crystallinity along with the gr… Show more

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Cited by 107 publications
(49 citation statements)
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“…The minimum crystallite size of 12.98 nm is belonging to Al 15.62 ZnO film. The same trend was observed in the studies performed on AZO films [15,19]. These studies assign the stress formation as reason for decreasing crystallite size and crystallinity with increasing Al content, too.…”
Section: Structural Characterizationsupporting
confidence: 84%
See 1 more Smart Citation
“…The minimum crystallite size of 12.98 nm is belonging to Al 15.62 ZnO film. The same trend was observed in the studies performed on AZO films [15,19]. These studies assign the stress formation as reason for decreasing crystallite size and crystallinity with increasing Al content, too.…”
Section: Structural Characterizationsupporting
confidence: 84%
“…However, we did not observe remarkable crystallization for Al 9.00 ZnO even after annealing at 500 • C. The extra peaks that can be attributed to deviation from single crystal phase were not observed. In the literature, as a negative effect of annealing process some peaks such as the ones that originate from (1 0 0) and (1 0 1) planes of polycrystalline structured Würtzite ZnO lattice [17,18] or Al 2 O 3 and metallic Al phase characteristic peaks [19] were registered from annealed samples.…”
Section: Structural Characterizationmentioning
confidence: 99%
“…With an increase in the annealing temperature, the occurrence of surface pinholes and voids decreases and there is also a slight increase in grain size, indicating that high temperature annealing assists particle growth. This observation can be explained by noting that, at high temperatures, atoms have sufficient diffusion activation energy to occupy the more energetically favorable sites in the crystal lattice, with the result that grains with lower surface energy eventually coalescence by grain boundary diffusion leading to significant grain growth [35]. The cross-sectional micrograph and film thickness are presented in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…However, when the annealing temperature increases, the average roughness also increased. One possible factor is the kinetic energy of deposited species increase with the RF sputtering power enhance the atom mobility in local regions [21]. The increasing kinetic energy increases probability of incident particle for surface diffusion wh growth, as a result the roughness of films increase.…”
Section: Resultsmentioning
confidence: 99%