Influence of atmospheric-pressure plasma treatment on surface and electrical properties of photodiode chips

Ikeda, So; Higurashi, Eiji; Suga, Tadatomo

doi:10.1109/icep-iaac.2015.7111097

2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IAAC) 2015

DOI: 10.1109/icep-iaac.2015.7111097

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Influence of atmospheric-pressure plasma treatment on surface and electrical properties of photodiode chips

So Ikeda

Eiji Higurashi

Tadatomo Suga

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Influence of atmospheric-pressure plasma treatment on surface and electrical properties of photodiode chips

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References 12 publications

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