Influence of bias potential and layer arrangement on structure and mechanical properties of arc evaporated Al–Cr–N coatings

Sabitzer, C.; Paulitsch, J.; Kolozsvári, S.; Rachbauer, R.; Mayrhofer, P.H.

doi:10.1016/j.vacuum.2014.03.006

Cited by 41 publications

(27 citation statements)

References 33 publications

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“…Ball-crater technique and cross-sectional scanning electron microscopy (SEM) show an interlayer thickness of 0.5 μm and coating thicknesses between 3.1 and 3.2 μm for the TiN, Ti 0.5 Al 0.5 N, CrN, and Cr 0.3 Al 0.7 N coatings. The chemical composition of our ternary nitride coatings is based on previous studies and corresponds to Cr 0.32 Al 0.68 N [23] and Ti 0.54 Al 0.46 N [24]. There, the nitrogen content of all coatings deposited is between 49 and 50 at.%, hence we use a nomenclature for our coatings corresponding to stoichiometric nitrides.…”

Section: Methodsmentioning

confidence: 99%

Diffusion behavior of C, Cr, and Fe in arc evaporated TiN- and CrN-based coatings and their influence on thermal stability and hardness

Sabitzer

Steinkellner

Koller

et al. 2015

Surface and Coatings Technology

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Section: Methodsmentioning

confidence: 99%

Diffusion behavior of C, Cr, and Fe in arc evaporated TiN- and CrN-based coatings and their influence on thermal stability and hardness

Sabitzer

Steinkellner

Koller

et al. 2015

Surface and Coatings Technology

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“…AlCrN has better wear resistance due to the formation of permanent oxide layers on the worn surfaces. AlCrN coatings can be produced by various methods, including magnetron sputtering (Ref [14][15][16][17][18], HIPIMS (Ref [19][20][21] and cathodic arc evaporation ( Ref 8,9,[22][23][24][25]. Dependent on the deposition method applied and the technological parameters of coating deposition, different structure and mechanical properties can be obtained.…”

Section: Introductionmentioning

confidence: 99%

Structure, Morphology, and Mechanical Properties of AlCrN Coatings Deposited by Cathodic Arc Evaporation

Gilewicz

Jędrzejewski

Myśliński

et al. 2019

J. of Materi Eng and Perform

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AlCrN coatings were deposited on steel substrates (HS6-5-2) using cathodic arc evaporation. The effect of nitrogen pressure on the properties of CrAlN coatings formed from Al 80 Cr 20 cathode, such as chemical and phase composition of the coatings, surface morphology, deposition rate, hardness and adhesion to the substrate, and friction and wear were investigated. The coating deposited at nitrogen pressure of 3 Pa shows the highest deposition rate. The roughness parameter Ra of the coating surface decreases with increasing nitrogen pressure during its formation. The test results showed that the AlCrN coatings deposited under nitrogen pressure in the range from 1 to 5 Pa show similar hardness for all the coatings, which is around 17 GPa. The increase in the negative bias voltage of the substrate during the formation of the coating deteriorates its adhesion to the substrate, although the wear rate is rather good, about 1.4 3 10 27 mm 3 /Nm. The coatings deposited at nitrogen pressure of 3-4 Pa are characterized by the highest critical load, 95 N. Despite worse adhesion, these coatings are characterized by high resistance to wear, the wear rate is about 1.4 3 10 27 mm 3 /Nm.

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“…A Poisson's ratio ν of 0.18 was used for the cubic AlCrN phase. [10]. In general, E IT and H IT values are closely connected, since their ratio stays almost constant around 0.07.…”

Section: Residual Stress Analysismentioning

confidence: 84%

“…They observed a saturation at 100 V and a decrease of hardness and stress at 150 V bias voltage due to beginning delamination of the coating. Sabitzer et al reported on bias voltage variation to keep the cubic phase stable when increasing the Al content above 70 at.% [10,11]. They deposited mono-and multi-layers through arc evaporation of Al 90 Cr 10 and Al 70 Cr 30 source materials (targets).…”

Section: Introductionmentioning

confidence: 99%

Phase and Residual Stress Evaluation of Dual-Phase Al70Cr30N and Al80Cr20N PVD Films

Kohlscheen

Shibata

2019

Crystals

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We investigated arc ion-plated Al70Cr30N and Al80Cr20N thin films deposited with three different bias voltages (50 V, 100 V, and 150 V) to study crystal phase stabilities, residual stresses, and mechanical properties. Commercial compositions of AlxCr100–xN coatings typically range from x = 50 to 70 where the cubic face centered crystal phase occurs. The present study focuses on films near the solubility limit of Al in the cubic Cr(Al)N lattice around 70 at.%, above which hexagonal AlN (h–AlN) starts to form in significant amounts. Residual stress values are obtained by two methods: grazing incidence diffraction with the wholepattern fitting and the conventional side inclination method (sin2Ψ method). When multiple phases are present in the film, wholepattern fitting turns out to be particularly effective and a comparison of both measurement methods will be discussed. The Al70Cr30N films consist of the cubic phase with crystallite sizes of about 70 nm for all bias voltages. Compressive stress increased with bias voltage from about 3 to almost 6 GPa and coatings become brittle. Al80Cr20N films showed a different dependence on bias voltage. Using 50 V bias voltage in deposition, the major phase is h–AlN phase with a crystallite grain size of < 30 nm and (0002) preferred orientation. With increasing bias the cubic phase is stabilized also reaching about 70 nm crystallite size. In general, the compressive residual stress was significantly lower than for Al70Cr30N films for the same bias voltages which may be a result of the presence of the hexagonal phase. Wear and scratch tests confirmed higher ductility of the Al80Cr20N variants but reduced resistance of the films in impact wear testing.

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Influence of bias potential and layer arrangement on structure and mechanical properties of arc evaporated Al–Cr–N coatings

Cited by 41 publications

References 33 publications

Diffusion behavior of C, Cr, and Fe in arc evaporated TiN- and CrN-based coatings and their influence on thermal stability and hardness

Diffusion behavior of C, Cr, and Fe in arc evaporated TiN- and CrN-based coatings and their influence on thermal stability and hardness

Structure, Morphology, and Mechanical Properties of AlCrN Coatings Deposited by Cathodic Arc Evaporation

Phase and Residual Stress Evaluation of Dual-Phase Al70Cr30N and Al80Cr20N PVD Films

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