2002
DOI: 10.1080/00202967.2002.11871464
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Influence of Chloride and PEG on Electrochemical Nucleation of Copper

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Cited by 8 publications
(3 citation statements)
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“… , From the results, the average diffusion coefficient D ave was obtained as 1.81 × 10 –6 cm 2 /s. This measured D m was close to the previously reported diffusion coefficient of Cu ions in PEG by other researchers. …”
Section: Resultssupporting
confidence: 91%
“… , From the results, the average diffusion coefficient D ave was obtained as 1.81 × 10 –6 cm 2 /s. This measured D m was close to the previously reported diffusion coefficient of Cu ions in PEG by other researchers. …”
Section: Resultssupporting
confidence: 91%
“…Various theories and models have been put forward to interpret CTTs with different features. Among these models, Scharifker-Hills (S-H) model [26] is suitable for the treatment of CTTs with a well-defined maximum [8,11,[14][15][16][17][25][26][27][28][29][30]. The CTTs measured from acid sulfate baths in the absence and presence of MPS additive combinations at different potentials from -0725 to -0.850 V are shown in Fig.…”
Section: Chronoamperometrymentioning
confidence: 99%
“…High nuclei number density is favorable to the microvia filling without void. With regard to a three-component additive package, effects of PEG [8,11,[14][15][16], Cl [8,16,17], PEGCl [11,[15][16][17], and PEG-Cl-SPS [8,18] on copper electrocrystallisation have been studied. It has been found that the nucleation of copper in an acidic sulfate solution follows an instantaneous nucleation together with a 3-dimensional growth mechanism.…”
Section: Introductionmentioning
confidence: 99%