2009
DOI: 10.1016/j.mseb.2008.05.015
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Influence of chromium on minority carrier properties in intentionally contaminated n-type mc-Si wafers

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Cited by 4 publications
(3 citation statements)
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“…Following these studies, the tolerable concentration of chromium in p‐type silicon is lower than for iron. Phosphorus diffusion gettering of chromium was found to be quite effective: A strong increase of the minority carrier lifetime during phosphorus diffusion was shown for chromium‐contaminated n‐type and p‐type silicon wafers.…”
Section: Introductionmentioning
confidence: 99%
“…Following these studies, the tolerable concentration of chromium in p‐type silicon is lower than for iron. Phosphorus diffusion gettering of chromium was found to be quite effective: A strong increase of the minority carrier lifetime during phosphorus diffusion was shown for chromium‐contaminated n‐type and p‐type silicon wafers.…”
Section: Introductionmentioning
confidence: 99%
“…A good summary was given by Coletti et al [26,49]. Fortunately, Cr is quite volatile at high temperature (above 1205 C) and could be easily removed during solidification (k eff w 10 À6 ) [51]. In addition, the sensitivity of the impurity level depends on the capture cross-section ratio.…”
Section: Transition Metalsmentioning
confidence: 99%
“…Second, MacDonald et al [21] and Schmidt et al [19], respectively, measured [Fe i ] about three orders of magnitude lower than the total [Fe] and [Cr i ] about one order of magnitude lower than the total [Cr]. Moreover, it has been shown on intentionally contaminated n-type mc-Si wafers that the concentration of Cr i atoms is sufficiently low to be not detrimental, thanks to a marked gettering effect of the high temperature phosphorus diffusion step [22]. Contrary to Veirman et al, the hypothesis of dopantlimited t has to be taken with caution in our case because the observed t eff profile could be explained by the recombination activity of other defects than Fe or Cr as well.…”
Section: Impact Of Processing Stepsmentioning
confidence: 99%