Abstract:Purpose -The paper aims to present the influence of the co-firing process conditions of low temperature co-fired ceramics (LTCC) on the deformation of thin LTCC membranes. Design/methodology/approach -The statistical design of the experiment methodology was used in the frame of these investigations to reduce the time and costs of the experiments and to ensure easier interpretation of the obtained results. Moreover, this conception permits the rough estimation of the membrane deflection fired at optimal process… Show more
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