“…[4][5][6] Especially with regard to hot corrosion resistance, chromium nitride coatings evidence promising properties. 7,8 W-N thin films were examined as a diffusion barrier for Al and Cu metallization in ultralarge scale integrated circuits. [9][10][11] Concerning the Cr-based ternary nitrides, the mechanical and structural properties of Cr-Ti-N, 12 Cr-Mo-N, 13 and Cr-W-N 14 thin films were recently reported by Hones et al Ternary compounds give rise to the opportunity to adjust parameters like lattice constant, hardness, elasticity, thermal expansion, or corrosion stability in order to optimize the overall performance of the coating.…”