2021
DOI: 10.3390/ma14041038
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Influence of Conditioning Temperature on Defects in the Double Al2O3/ZnO Layer Deposited by the ALD Method

Abstract: In this work, we present the results of defects analysis concerning ZnO and Al2O3 layers deposited by atomic layer deposition (ALD) technique. The analysis was performed by the X-band electron paramagnetic resonance (EPR) spectroscopy, transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS) methods. The layers were either tested as-deposited or after 30 min heating at 300 °C and 450 °C in Ar atmosphere. TEM and XPS investigations revealed amorphous nature and non-stoichiometry of alum… Show more

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Cited by 7 publications
(7 citation statements)
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“…The peaks show a strong resemblance with Al 2 O 3 (Corundum) major‐XRD reflections, [ 64 ] and earlier studies of Al 2 O 3 films via GI‐XRD (JCPDS‐ICDD File #46‐1212). [ 65 ] The aluminum oxide thickness was determined as described in Section S2 (Supporting Information). XPS on the Teflon‐coated surface confirmed the fluorinated‐layer spectral signature reported in earlier research.…”
Section: Resultsmentioning
confidence: 99%
“…The peaks show a strong resemblance with Al 2 O 3 (Corundum) major‐XRD reflections, [ 64 ] and earlier studies of Al 2 O 3 films via GI‐XRD (JCPDS‐ICDD File #46‐1212). [ 65 ] The aluminum oxide thickness was determined as described in Section S2 (Supporting Information). XPS on the Teflon‐coated surface confirmed the fluorinated‐layer spectral signature reported in earlier research.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 6 , Figure 7 and Figure 8 show the dependence of g eff as a function of temperature for the “ferromagnetic” line (g eff ≈ 5), the Pb 3+ (g eff ≈ 2), and Pb 1+ (g eff ≈ 1.1). For the EPR line with g eff ≈ 1.1, we observe the overlapping of signals from the Pb 1+ ion and various defects related to oxygen ions [ 42 ]. At lower temperatures, there is a clear separation of these lines, and for the Pb 1+ ion, we can observe a clear and narrow line (e.g., sample N150), while, in the other samples, this line is much weaker.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, in this work were using two economically attractive Zinc-Oxide NanoRods (ZnO NR) production based on Atomic Layer Deposition (ALD) and subsequent chemical bath 59,60 . This technique allows for fabrication of oxide materials upon very large surfaces significantly reducing the fabrication costs [61][62][63][64][65] .…”
Section: Piezoelectric-based Light Conversionmentioning
confidence: 99%