2015
DOI: 10.1016/j.tsf.2015.03.058
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Influence of deposition conditions on the composition, texture and microstructure of RF-magnetron sputter-deposited hydroxyapatite thin films

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Cited by 42 publications
(25 citation statements)
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“…From this, we recalculate the deposition rate in our magnetron sputtering system which is equal to 2.5 nm/min. In contrast, average coating growth rate reported by other research group for HA films is around 1 nm/min and less when the targetto-substrate distance was set to 40 mm (Ivanova et al, 2015). Hence, we conclude that the deposition rate in our sputtering system could be considered as high, which will affect the growing coating.…”
Section: Resultscontrasting
confidence: 58%
“…From this, we recalculate the deposition rate in our magnetron sputtering system which is equal to 2.5 nm/min. In contrast, average coating growth rate reported by other research group for HA films is around 1 nm/min and less when the targetto-substrate distance was set to 40 mm (Ivanova et al, 2015). Hence, we conclude that the deposition rate in our sputtering system could be considered as high, which will affect the growing coating.…”
Section: Resultscontrasting
confidence: 58%
“…Therefore, the preparation of HA coatings with c-axis orientation might be highly reliable in medical applications. There are several techniques such as radio-frequency thermal plasma spraying (TPS) [20][21][22] and micro-plasma spray (MPS) [9,14,19] that have been reported to prepare HA coatings with strong (002) crystallographic textures. Compared with radio-frequency (RF)-TPS, MPS can be used to obtain HA coatings with (002) crystallographic textures and high HA content.…”
Section: Introductionmentioning
confidence: 99%
“…1, the preferential crystallite orientation of the diffraction peaks are changed with the dipping cycles. The quantitative information related the preferential crystallite orientation of the PbS thin films with the dipping cycles was calculated from the texture coefficient, TC(h k l), as the following equation [12]:…”
Section: Discussionmentioning
confidence: 99%