Influence of deposition temperature on the properties of Al&lt;inf&gt;2&lt;/inf&gt;O&lt;inf&gt;3&lt;/inf&gt; thin films

Zhan, Min; Luo, Wei; Shao, Jianda

doi:10.1109/cleopr.2009.5292389

2009 Conference on Lasers &Amp; Electro Optics &Amp; The Pacific Rim Conference on Lasers and Electro-Optics 2009

DOI: 10.1109/cleopr.2009.5292389

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Influence of deposition temperature on the properties of Al<inf>2</inf>O<inf>3</inf> thin films

Min Zhan

Wei Luo

Jianda Shao

Abstract: Al 2 O 3 thin films were characterized by optical and structural properties, as well as LIDT under 355 nm Nd:YAG laser. It was found that the deposition temperature had no clear effect on the LIDT in our experiments.

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Influence of deposition temperature on the properties of Al<inf>2</inf>O<inf>3</inf> thin films

Abstract: Al 2 O 3 thin films were characterized by optical and structural properties, as well as LIDT under 355 nm Nd:YAG laser. It was found that the deposition temperature had no clear effect on the LIDT in our experiments.

Cited by 0 publications

References 14 publications

No citations

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