Influence of dissipated power distribution on BAW Resonators' behavior

Abstract

By taking the spatial distribution of the dissipated power into account the modeling of Bulk Acoustic Wave Resonators at higher power levels could be improved. The simulation results have been verified by measurements of vectorial scattering parameters during high power loads and by measurements of the temperature increase due to the self-heating by infrared thermography.

Modeling of BAW filters for system level simulation

“…Extension of the 1D model by an additional resistance allows also to take the dielectric losses in the dielectric layers and the resistive losses in the electrodes into account [7]. By an additional parallel resistance also the lateral leaking waves depending on the resonator area can be modeled [8]. The 1D model can then be used to optimize the amount of the acoustic wave confined within the piezoelectric active and not active layers, the reflection of the longitudinal and shear waves by the Bragg mirror and the electric losses by changing the thicknesses of the different layers within a specified range.…”

Study of transient characteristics of BAW filters under high power levels

“…[10][11][12] A shift of the transfer function to lower frequencies for increasing power levels was reported. [13][14][15][16][17] The research of [18][19][20] indicated that the absorbed power of the resonators had a noticeable left-shift when power increased. And in Refs.…”