2000
DOI: 10.1063/1.1150487
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Influence of doping on sensitivity and response time of TiO2 oxygen gas sensor

Abstract: Metal ion-doped SnO 2 ordered porous films and their strong gas sensing selectivity Appl. Phys. Lett. 96, 103115 (2010); 10.1063/1.3358389Effectively enhanced oxygen sensitivity of individual ZnO tetrapod sensor by water preadsorption

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Cited by 12 publications
(11 citation statements)
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“…Yang et al explained that the anatase phase of TiO 2 thin lm also can also contribute to the stability by controlling its parameter properties. 12 There is also an indication that anatase is the most promising phase because of its higher surface reactivity to gases 13 and photocatalysts. 14 Trivalent dopants need to be used to improve the conductivity, decrease grain growth, increase the crystallinity of the peak and increase the surface area.…”
Section: Introductionmentioning
confidence: 99%
“…Yang et al explained that the anatase phase of TiO 2 thin lm also can also contribute to the stability by controlling its parameter properties. 12 There is also an indication that anatase is the most promising phase because of its higher surface reactivity to gases 13 and photocatalysts. 14 Trivalent dopants need to be used to improve the conductivity, decrease grain growth, increase the crystallinity of the peak and increase the surface area.…”
Section: Introductionmentioning
confidence: 99%
“…[12][13][14][15][16][17][18][19][20][21][22][23] This feature helps find any difference of time dependences of electrical response and optical transmittance response, because the former is more sensitive to surface reaction and the latter is more dependent on the bulk reaction throughout the light path. The time dependences of optical reflectance due to the reflected light from the gas-film interface or that from the film-substrate interface may have some difference if diffusion of detected gas molecules/atoms needs some time to diffuse inside the material.…”
Section: A Flexibility and Versatilitymentioning
confidence: 99%
“…[12][13][14][17][18][19][20][21][22] In continuous flow method, admixture containing the detected gas is kept to flow throughout a test. If a net H 2 flow of 0.016 sccm is applied as in the previous example, a flow of 16 000 sccm of balancing gas is required to dilute H 2 to 1 ppm.…”
Section: B Control Of Gas Compositionmentioning
confidence: 99%
“…Furthermore, the density of oxygen vacancies is inversely proportional to the oxygen ratio during sputtering. 4,5) Therefore, the lower the oxygen, the better the sensitivity is. Different values of O 2 /Ar affect the density of oxygen vacancies but not the grain size.…”
Section: Measurements Of Sensitivitymentioning
confidence: 99%
“…Sensitivity is mainly determined by grain size, 1,2) the number of surface electrons 3) and the density of oxygen vacancies in the crystal. 4,5) In this study, similar grain sizes were used in all samples, the double layer structure was used for increased the number of surface electrons and the Ar/O 2 ratio under which the film was sputtered was changed to obtain the optimal oxygen vacancy density.…”
Section: Introductionmentioning
confidence: 99%