Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation

Zhang, Kunpeng; Xie, Jianwei; Hao, Shuying; Zhang, Qichang; Feng, Jingjing

doi:10.3390/mi14010211

Cited by 6 publications

(4 citation statements)

References 47 publications

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“…For the convenience of analysis, equation (35) is expressed in the following form: b ¯can be changed in magnitude by varying the gap between the electrode plate. In the studies considering electrostatic force nonlinearity, the cubic nonlinearity coefficients of electrostatic force have the most significant effect on the nonlinear performance of the system [13,33]. Thus, we only discuss the effect of the cubic nonlinear coefficients 5 b ¯of electrostatic force on the dynamic characteristics of the system, as shown in figure 19.…”

Section: Effects Of Nonlinear Coefficient Of Electrostatic Force On T...mentioning

confidence: 99%

Nonlinear vibration and amplitude ratio output performance of a resonant micro-gyroscope based on bifurcation detection

Hao,

Li,

Zhang

2024

Phys. Scr.

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In this paper, we design a 3-degree-of-freedom (3-DOF) nonlinear resonant micro-gyroscope, which innovatively utilizes the bifurcation phenomenon of the nonlinear resonant beam as a detection method and uses the amplitude ratio before and after bifurcation as the sensitivity output of the system. The steady-state response of the driving equation is first solved by the complex exponential method. Coriolis force is amplified by the lever mechanism and transmitted to the axial direction of the resonant beam. The dimensions of the resonant beam are designed so that the frequency of Coriolis force is in a 2:1 relationship with the natural frequency of the resonant beam to enhance the parametric excitation effect. Subsequently, Hamilton principle and Galerkin method are used to derive and discretize the dynamical equations of the resonant beam containing axial force, respectively. The multi-scale method is used to perturbation analysis of discrete equations. Finally, the bifurcation characteristics and the amplitude-frequency response with different input angular velocities are studied. The results show that the comprehensive performance of the micro-gyroscope system using backward frequency sweep (BFS) is better than forward frequency sweep (FFS). Furthermore, by using the BFS, the relative sensitivity of the nonlinear resonant micro-gyroscope based on the amplitude ratio variation rises by about 168 times compared with that based on the frequency variation in the linear case. In addition, when considering the input angular velocity with the same magnitude but different directions, the bifurcation frequency of resonant beam is closely related to the direction of the input angular velocity, and the direction of the input angular velocity can be further identified by utilizing this phenomenon.

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Section: Effects Of Nonlinear Coefficient Of Electrostatic Force On T...mentioning

confidence: 99%

Nonlinear vibration and amplitude ratio output performance of a resonant micro-gyroscope based on bifurcation detection

Hao,

Li,

Zhang

2024

Phys. Scr.

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“…Through the signal processing circuit, a small change in capacitance can be converted into a current, voltage, or frequency that is easy to measure. At present, the common methods for capacitance detection of capacitive sensors include the frequency modulation method [2] , the resonance method [3] , the modulation and demodulation method [4]- [5] , and the switching capacitance method [6] , among others. The frequency modulation method has the advantages of strong antiinterference ability and stable transmission.…”

Section: Introductionmentioning

confidence: 99%

Research on high-resolution capacitance detection circuit based on T-type network

Yin,

Liu,

Hao

2024

J. Phys.: Conf. Ser.

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The capacitance detection circuit is a key component of the servo circuit of the quartz flexible accelerometer, which needs to ensure high-precision capacitance detection. The small capacitance change of the quartz flexible accelerometer pendulum will be affected by the noise of each device in the servo loop. To solve this problem, we design a single carrier modulation and demodulation capacitance detection circuit based on a T-type network from the capacitance detection model of a quartz flexible accelerometer. We established a circuit noise model, quantitatively analyzed the noise of the entire capacitance detection circuit from the theoretical level, and obtained the equivalent capacitance noise of the circuit. The rationality and effectiveness of the high-precision capacitance detection circuit are verified by theoretical calculation. We also verify the accuracy of the theoretical calculation through simulation and obtain the signal-to-noise ratio of the circuit. Finally, we prove that the scheme is a high-precision capacitance detection scheme.

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“…The pull-in of capacitors means the contact of two neighboring capacitors and the stop of micro gyroscopes’ operation. To be specific, there are two types of pull-in: static pull-in [ 20 , 21 , 22 ] and dynamic pull-in [ 23 , 24 ]. The former comes from the imbalanced static case of the microstructures, thus being unavoidable, whereas the occurrence of the latter relies on the initial states of the oscillatory systems.…”

Section: Introductionmentioning

confidence: 99%

Jump and Pull-in Instability of a MEMS Gyroscope Vibrating System

Zhu

Shang

2023

Micromachines

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Jump and pull-in instability are common nonlinear dynamic behaviors leading to the loss of the performance reliability and structural safety of electrostatic micro gyroscopes. To achieve a better understanding of these initial-sensitive phenomena, the dynamics of a micro gyroscope system considering the nonlinearities of the stiffness and electrostatic forces are explored from a global perspective. Static and dynamic analyses of the system are performed to estimate the threshold of the detecting voltage for static pull-in, and dynamic responses are analyzed in the driving and detecting modes for the case of primary resonance and 1:1 internal resonance. The results show that, when the driving voltage frequency is a bit higher than the natural frequency, a high amplitude of the driving AC voltage may induce the coexistence of bistable periodic responses due to saddle-node bifurcation of the periodic solution. Basins of attraction of bistable attractors provide evidence that disturbance of the initial conditions can trigger a jump between bistable attractors. Moreover, the Melnikov method is applied to discuss the condition for pull-in instability, which can be ascribed to heteroclinic bifurcation. The validity of the prediction is verified using the sequences of safe basins and unsafe zones for dynamic pull-in. It follows that pull-in instability can be caused and aggravated by the increase in the amplitude of the driving AC voltage.

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Influence of Electrostatic Force Nonlinearity on the Sensitivity Performance of a Tapered Beam Micro-Gyroscope Based on Frequency Modulation

Cited by 6 publications

References 47 publications

Nonlinear vibration and amplitude ratio output performance of a resonant micro-gyroscope based on bifurcation detection

Nonlinear vibration and amplitude ratio output performance of a resonant micro-gyroscope based on bifurcation detection

Research on high-resolution capacitance detection circuit based on T-type network

Jump and Pull-in Instability of a MEMS Gyroscope Vibrating System

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