Influence of energetic ion bombardment on W-C:H coatings deposited with W and WC targets

Strondl, C.; Carvalho, N.M.; Hosson, J.Th.M. De; Krug, Thomas

doi:10.1016/j.surfcoat.2005.02.182

Cited by 33 publications

(22 citation statements)

References 11 publications

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“…The total thickness of the a-C:H layer was 2.8 ± 0.2 m. The compressive residual stress of 0.9 ± 0.05 GPa was determined through substrate deflection before and after H-DLC film deposition on a pure Si wafer. Similar values for this type of coatings were put forward in [25,26]. …”

Section: Materials and Depositionsupporting

confidence: 68%

Tribological performance of an H-DLC coating prepared by PECVD

Solís

Zhao

Wang

et al. 2016

Applied Surface Science

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and 5.5 x 10 -8 mm -3 /N m, respectively. Through Raman spectroscopy and electron microscopy it was confirmed the carbon-carbon contact, due to the tribolayer formation on the wear scars of the coating and pin. In order to further corroborate the experimental observations regarding the graphitisation behaviour, the existing mathematical relationships to determine the graphitisation temperature of the coating/steel contact as well as the flash temperature were used.

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Section: Materials and Depositionsupporting

confidence: 68%

Tribological performance of an H-DLC coating prepared by PECVD

Solís

Zhao

Wang

et al. 2016

Applied Surface Science

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“…The range of measured values of the Young's modulus of the a-C:H:W variants of E = 80 − 253 GPa is in good agreement with those published by other authors (E = 92 − 143 GPa [11]; E = 140 − 240 GPa [5]). The same applies to the measured values of the indentation hardness in the range of H IT = 7.8 − 22.0 GPa.…”

Section: Young's Modulus and Indentation Hardnesssupporting

confidence: 91%

“…Even though the observed positive effect of the bias voltage on E and H IT was also reported by other authors [5,12,39], no full explanation has been provided yet. With respect to a-C:H:W coatings, the negative effect of the argon flow (C) on E an H IT has not yet been described in the literature.…”

Section: Effects Of the Bias Voltage And The Argon Flow Ratementioning

confidence: 58%

“…At first glance, this suggests that there is generally not too much scope for independently adapting the Young's modulus and hardness of a-C:H:W coatings. Within the scope of smaller studies, an increase in hardness with increasing bias voltage is also described in [5,12,39]. A general decrease in hardness with increasing ethine flow rate is shown in [12,39].…”

Section: Young's Modulus and Indentation Hardnessmentioning

confidence: 82%

“…The same applies to the measured values of the indentation hardness in the range of H IT = 7.8 − 22.0 GPa. Hardness values documented in the literature are almost entirely covered (H IT = 8 − 17 GPa [13]; H IT = 8 − 18 GPa [5];H IT = 11 − 14 GPa [11]; H IT = 16 − 23 GPa [12]). As shown in Figure 7, there is a very strong correlation between E and H IT .…”

Section: Young's Modulus and Indentation Hardnessmentioning

confidence: 99%

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Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings

et al. 2014

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Tungsten-modified hydrogenated amorphous carbon coatings (a-C:H:W) were deposited on high speed steel by reactive magnetron sputtering of a tungsten carbide target in an argon-ethine atmosphere. The deposition parameters, sputtering power, bias voltage, argon and ethine flow rate, were varied according to a central composite design comprising 25 different parameter combinations. For comparison, a tungsten carbide coating was deposited, as well. During coating deposition, the process variables, total pressure, sputtering voltage and bias current, were measured as process characteristics. The thickness of the deposited coatings was determined using the crater grinding method, and the deposition rate was calculated. Young's modulus E and indentation hardness H IT were characterized by means of nanoindentation. With E = 80 − 253 GPa and H IT = 7.8 − 22.0 GPa, the mechanical properties were found to vary strongly in between different a-C:H:W variants. Using statistical methods, it is shown that these properties, as well as the deposition rate significantly depend on all four varied parameters. Despite a very similar influence of the parameters on modulus and hardness, as well as a very strong correlation of both properties, it is pointed out statistically that the H/E ratio, which is an indicator of the wear resistance, can be adapted in a targeted way and with some degree of independence.

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Amorphous Carbon Coatings for Sheet-Bulk Metal Forming Tools

Weikert

Tremmel

2020

Lecture Notes in Production Engineering

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Influence of energetic ion bombardment on W-C:H coatings deposited with W and WC targets

Cited by 33 publications

References 11 publications

Tribological performance of an H-DLC coating prepared by PECVD

Tribological performance of an H-DLC coating prepared by PECVD

Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings

Amorphous Carbon Coatings for Sheet-Bulk Metal Forming Tools

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