Influence of Energy Nitrogen Ion Implantation on Structural and Mechanical Properties of Chromium Thin Film

Manouchehrian, M.; Larijani, M. M.; Banagar, Bahman

doi:10.12785/ijtfst/030207

Cited by 4 publications

(1 citation statement)

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“…Both the ion and dislodged target atoms can continue and cause further damage, and so the energy is spread over many moving particles. Therefore, after implantation of high doses of ions an initially crystalline target will be so perturbed that it will have changed to a highly disordered state [14]. The amount of crystallographic damage can be enough to cause the partial amorphization of the metal surface, depending on the dose, energy, temperature (governing self-annealing that can occur to repair some or all of the damage as it is generated) and ion species (heavy ions displace a greater volume of target atoms per ion [15].…”

Section: Introductionmentioning

confidence: 99%

Effect of Nitrogen Ion Implantation on the Surface Hardness, Corrosion Rate, and Crystal Structure of Pure Aluminium

Priyantoro¹,

Mulyani²,

Sujitno³

2019

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The weakness of aluminium and its alloys are relative low hardness and wear resistance. To improve this weakness a nitrogen ion implantation technique has been carried out. For the purpose, an ion implantation process was carried out for various of dose such as 0.578×10 16 ion/cm 2 , 0.706×10 16 ion/cm 2 , 0.842×10 16 ion/cm 2 , 0.970×10 16 ion/cm 2 , and 1.106×10 16 ion/cm 2 at a certain energy and beam current, 60 keV and 75 µA, respectively. Hardness test was performed using microhardness tester, the corrosion resistance was tested using the electrochemical method, and the crystal structure was analyzed using X-ray diffraction. From the hardness test result, it can be concluded that the optimum hardness in order of 37.5 VHN was achieved at an ion dose of 0.83×10 17 ion/cm 2. While the hardness for the untreated sample was 18.70 VHN. It meant, there is an increasing hardness by a factor of 100,53%. At these conditions, the corrosion rate reduces from 0.012 mmpy to 0.011 mmpy or reduce by a factor of 8.3%. Based on the XRD analysis, it can be obtained the AlN phase is formed through the peaks at 2-theta was 39.37° (111), 45.76° (200), and 66.88° (202).

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Section: Introductionmentioning

confidence: 99%