2022
DOI: 10.3390/nano12172958
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Influence of Grain Boundary Scattering on the Field-Effect Mobility of Solid-Phase Crystallized Hydrogenated Polycrystalline In2O3 (In2O3:H)

Abstract: Hydrogenated polycrystalline In2O3 (In2O3:H) thin-film transistors (TFTs) fabricated via the low-temperature solid-phase crystallization (SPC) process with a field-effect mobility (μFE) exceeding 100 cm2 V−1 s−1 are promising candidates for future electronics applications. In this study, we investigated the effects of the SPC temperature of Ar + O2 + H2-sputtered In2O3:H films on the electron transport properties of In2O3:H TFTs. The In2O3:H TFT with an SPC temperature of 300 °C exhibited the best performance,… Show more

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Cited by 4 publications
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“…[60] Most of the studies attribute the enhanced mobility to the passivation of hydrogen and the promotion of grain growth, although direct evidence and characterization at the atomic scale are lacking. In 2 O 3 :H films have been widely used in various fields such as thin-film transistors, [61,62] silicon solar cells, [63] perovskite solar cells, [64,65] and quantum dot solar cells. [66] Despite a large number of studies on high mobility In 2 O 3 :H film applications, the exact processes involved in hydrogen doping and scattering remain unclear, and the specific mechanism of the high mobility of In 2 O 3 :H film is still uncertain.…”
Section: Introductionmentioning
confidence: 99%
“…[60] Most of the studies attribute the enhanced mobility to the passivation of hydrogen and the promotion of grain growth, although direct evidence and characterization at the atomic scale are lacking. In 2 O 3 :H films have been widely used in various fields such as thin-film transistors, [61,62] silicon solar cells, [63] perovskite solar cells, [64,65] and quantum dot solar cells. [66] Despite a large number of studies on high mobility In 2 O 3 :H film applications, the exact processes involved in hydrogen doping and scattering remain unclear, and the specific mechanism of the high mobility of In 2 O 3 :H film is still uncertain.…”
Section: Introductionmentioning
confidence: 99%