Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays

Barth, S.; Derenko, Susan; Bartzsch, Hagen; Zywitzki, O.; Modes, T.; Patrovsky, Fabian; Fiehler, Vera; Uhlig, Tobias; Frach, Peter; Eng, Lukas M.

doi:10.1016/j.tsf.2019.02.032

Cited by 4 publications

(1 citation statement)

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“…It has been reported that anodic porous alumina is formed on substrates by forming an Al film by sputtering or thermal evaporation and subsequent anodization in an acidic solution. [15][16][17][18][19][20] However, in most studies, the pore arrangement of the resulting anodic porous alumina was disordered. To fabricate anodic porous alumina with an ordered pore arrangement from the surface to the bottom, it is effective to form an ordered depression pattern on the surface of an Al substrate, which serves as the starting point for pore generation.…”

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confidence: 99%

Fabrication of Ideally Ordered Anodic Porous Alumina on Glass Substrates by Stamping Process Using Flexible Stamps

Kato

Yanagishita

2023

ECS Adv.

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Establishing a process to fabricate anodic porous alumina with an ordered array of uniformly-sized pores on a substrate is an important challenge in fabricating various functional devices. In this study, ordered anodic porous alumina was fabricated on glass substrates by a stamping process using a flexible stamp. This process enables the formation of a resist mask at a low pressure on the sample surface to pattern the starting point for pore generation during anodization. Therefore, it is possible to pattern samples without breaking the glass substrate, and subsequent anodization can generate ordered anodic porous alumina on the substrate. The stamping process using flexible stamps can be applied regardless of the roughness of the Al film on a substrate because the stamp deforms according to the Al surface shape, even when there is a protruding structure on the Al surface. In addition, it was shown that this process could be used to form ordered anodic porous alumina even on Al surfaces with three-dimensional curvatures, such as convex lenses.

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confidence: 99%