Influence of growth rate on the structural and morphological properties of TiN, ZrN and TiN/ZrN multilayers

Synthesis of nano-crystalline zirconium aluminium oxynitride (ZrAlON) composite films by dense plasma Focus device

“…This means that for 30 Focus shots, the surface energy increases resulting in the growth of (2 0 0) phase of ZrN that reduces the texture coefficient of ZrN (1 1 1) plane. The decrease in texture coefficient may also be attributed with the nucleation of other compounds and films roughness since film roughness is strongly related with the texture [33]. It can additionally be due to the presence of other crystalline phases in the near vicinity as well as broaden and asymmetric peaks XRD data is also used to determine the residual stresses present in the composite films.…”

The investigation of adhesion and fatigue properties of TiN/TaN multilayer coatings

“…This high performance can be achieved by the synthesis of multilayer coatings in which the TiN layers alternate with metal or ceramic layers. [4] Several multilayer coatings in which TiN was one of the phases are reported in the literature: TiN/TiCN, [5] TiN/NbN, [6][7][8][9][10][11] TiN/VN, [6] TiN/AlN, [12,13] TiN/CrN, [14][15][16][17] TiN/ZrN, [18][19][20][21][22][23][24] TiN/TiAlN, [25] TiN/ TiBN, [26] TiN/CN, [27] TiN/TaN, [1][2][3][4]7,[28][29][30] etc.…”

Hard coating performance enhancement by using [Ti/TiN]n, [Zr/ZrN]n and [TiN/ZrN]n multilayer system

“…Fig. 2c shows the elemental compositions of deposited [TiN/ZrN] 12 multilayer film, where was observed the stoichiometric ratio (Ti/Zr = 1.32), which correspond to stoichiometric values from Ti and Zr elements in TiN/ZrN films [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. A careful correction has to be done in all stoichiometric analysis because EDX has low reliability for nitrogen concentration.…”

“…Some of these coatings, nowadays called heterostructures, such as alternate TiN/AlN, TiN/NbN or TiN/VN coatings exhibit very high hardness (>50 GPa) and offer potential advantages for dry milling, drilling and turning. For other bilayer combinations (Ti/TiN, Zr/ZrN and TiN/ZrN), maximum hardness values do not exceed 30 GPa, but they are still interesting for tribological applications, moreover new physicochemical properties such as anticorrosive properties are now heavily studied [5][6][7][8][9]. In this work, Ti/TiN, Zr/ZrN and TiN/ZrN multilayer films with a total thickness of 3 m for all multilayers were deposited via reactive r.f.…”