2022
DOI: 10.1007/s12633-022-01746-z
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Influence of High-k Passivation Layer on Gate Field Plate AlGaN/GaN/AlGaN Double Heterojunction HEMT

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Cited by 10 publications
(2 citation statements)
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“…Such differences include passivation material and implementation of field rings. Simulation work was conducted by R. Natarajan et al on different passivation materials for GaN HEMT devices and found differences in the electric field distribution, thus influencing the breakdown voltage [28]. From a design perspective, increasing the number of field rings between the gate and drain of the GaN HEMT would better shield the passivation from a high localized electric field [29].…”
Section: Discussionmentioning
confidence: 99%
“…Such differences include passivation material and implementation of field rings. Simulation work was conducted by R. Natarajan et al on different passivation materials for GaN HEMT devices and found differences in the electric field distribution, thus influencing the breakdown voltage [28]. From a design perspective, increasing the number of field rings between the gate and drain of the GaN HEMT would better shield the passivation from a high localized electric field [29].…”
Section: Discussionmentioning
confidence: 99%
“…In this work, the thickness of the passivation layer was fixed, whereas the permittivity k of the passivation material was varied for SiO 2 at 3.9, SiN at 7 and Al 2 O 3 at 9 [30]. The enhanced permittivity of the insulator will smoothen the electric field distributions along the barrier layer due to the uniform voltage drop across the high-k insulator [31]. Thus, the higher the k of the passivation material, the stronger the breakdown performance.…”
Section: The Device Structure Optimization Designmentioning
confidence: 99%