2012
DOI: 10.1088/0022-3727/45/34/345302
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Influence of hydrogen addition to an Ar plasma on the structural properties of TiO2−x thin films deposited by RF sputtering

Abstract: The influence of hydrogen addition to an Ar plasma on the structural properties of TiO2−x films produced by RF sputtering of a TiO2 target at room temperature was studied. The structural properties of the films were characterized by x-ray photoelectron spectroscopy while the surface morphology was analysed using scanning electron microscopy (SEM). The valence band analysis showed the crystal field splitting of d states into doubly and triply degenerate states. H2 addition to the Ar plasma cr… Show more

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Cited by 59 publications
(41 citation statements)
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“…These results confirm that the hydrogen gas evidently interacts with the MoS 2 surface even though the surface is thought to be inert unlike the catalytically active edge sites [27]. It is notable that an existence of carbon after the H 2 annealing implies that a formation of the hydrocarbon (C-H bonds) [28] was inevitable during the hydrogenation at the condition of Fig. 1(c) [18].…”
Section: −10supporting
confidence: 59%
“…These results confirm that the hydrogen gas evidently interacts with the MoS 2 surface even though the surface is thought to be inert unlike the catalytically active edge sites [27]. It is notable that an existence of carbon after the H 2 annealing implies that a formation of the hydrocarbon (C-H bonds) [28] was inevitable during the hydrogenation at the condition of Fig. 1(c) [18].…”
Section: −10supporting
confidence: 59%
“…6A) shows two intense peaks at 458. 4 Additional shoulders at 457.0 and 462.6 eV were also clearly identified by peak fitting procedure and correspond to the Ti 3+ cations [55,57]. In the case of the W 4d 5/2 region (Fig.…”
Section: Effects Of Composition and Sintering Conditions On Site Occumentioning
confidence: 71%
“…The main 2p 3/2 and 2p 1/2 doublets appear at 458.6 and 464.3 eV, respectively, with a spin-orbit splitting energy of 5.7 eV. [34][35][36] It is also noteworthy that, for both composition sets, the binding energies of the main 2p 3/2 sharp peak are slightly shifted to higher energies with increasing Ta content, likely due to the local structural distortions. In the case of tantalum, the high-resolution spectra were recorded in both 4f and 4d core level regions ( Fig 4B and 4C, respectively).…”
Section: Chemistry Of Materialsmentioning
confidence: 92%