To evaluate the effects of processes on physicochemical properties of oat bran soluble dietary fiber (OSDF), the oat bran was processed by steam heating, superfine grinding, and extrusion, and extracted to obtain OSDF. The molecular weight distribution, monosaccharide composition, transparency, solubility, structure, and thermal and morphological properties of OSDF were investigated. The yield of OSDF increased after the processing compared to the untreated. The proportion of high molecular weight granules was higher in OSDF from extruded oat bran. The backbone of the OSDF was not changed, but the proportion of the residue linkages in OSDF was varied after the processing. Solubility and swelling power showed significant positive correlation with molecular weight distribution while transparency showed significant negative correlation with molecular weight distribution. Three processes had great impact on the physicochemical properties of OSDF. The OSDF from superfine ground oat bran showed some physical-chemical properties that might be of potential use in the food industry.